Abstract
The determination of ion mass for low-pressure Maxwellian plasmas has been proposed. It can be done using Langmuir probe measurements and the Bohm formula for the ion current density to a floating probe, due to this formula's reliance on ion mass. This goal was achieved by accurate measurements of xenon plasma parameters in the inductive discharge at pressure p = 2 ⋅ 10(-3) Torr using the Plasma Sensors VGPS-12 probe station with the cylindrical Langmuir probes. The analysis of measurement data showed that in these conditions, the Bohm effect was valid with engineering-level precision, resulting in the experimental Bohm coefficient CBCyl ≈ 1.13 for cylindrical probes.
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