Time-resolved curling-probe measurements of electron density in high frequency pulsed DC discharges

Abstract

A plasma-induced shift in the resonance frequency of a curling probe measured by using a network analyzer (NWA) yields the electron density. This technique was applied here for measuring time-varying electron density in pulsed DC glow discharges. Using the NWA in an on-sweep synchronization mode with the discharge pulse allows measuring at pulse frequencies below 0.5 kHz. For higher pulse frequencies, an on-point mode was introduced which enabled time-resolved measurements of electron density at pulse frequencies reaching 25 kHz, with the minimal time interval of 2 µs, typically for nitrogen discharge at 10 Pa. In the afterglow regime, the decay time constant of electron density was measured for nitrogen and argon discharges at 40 Pa. In the case of argon, the electron density was observed to decrease in three steps. This characteristic behavior was tentatively attributed to a bi-Maxwellian electron energy distribution and Ramsauer effect, supported by Langmuir probe measurements.