Abstract Lead-free 0.5Ba(Zr 0.2 Ti 0.8 )O 3 –0.5(Ba 0.7 Ca 0.3 )TiO 3 (BZT–BCT) and the La 0.5 Sr 0.5 CoO 3 (LSCO) bottom electrode films were epitaxially grown onto the CeO 2 /Y 0.15 Zr 0.85 O 1.93 (YSZ) buffered Si (0 0 1) substrates via pulsed laser deposition. The lattice alignments between CeO 2 /YSZ and BZT–BCT/LSCO showed a 45° twisted cube-on-cube epitaxial relationship, indicating a high crystallinity of the BZT–BCT and LSCO films. The constituent elements in the BZT–BCT/LSCO/CeO 2 /YSZ structure showed no distinct inter-diffusion between each layer. The BZT–BCT epitaxial films showed a well saturation of the polarization–electric field ( P–E ).
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