We present simulations of external carrier injection in semiconductors with position-dependent band structure by numerical solution of the current transport equations across the device. As a model case, we examine electron-beam-induced current at heterojunctions. Our treatment is applicable to an arbitrary position-dependent band structure, and any form of external generation, and allows for an external bias applied to the device. The quality of ohmic contacts is taken account of by realistic boundary conditions. For excitation by an electron beam at a GaAs/AlGaAs n-N isotype heterojunction, we present band profiles, as well as linescans, of electron-beam-induced current and voltage. The influence of external generation rate, interface grading, and contact quality is investigated. The latter is shown to be important in epitaxial layers which are only a few minority-carrier diffusion lengths thick. The saturation behavior of the signal with increasing injection level is studied as a function of device parameters, and the applicability of such measurements to the determination of band offsets is critically discussed.
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