Hard coatings based on BCN/CN/BN multilayer films were deposited on Si substrates using a double ion beam sputtering system. The multilayers were obtained by sequential sputtering of BN, C and B 4C targets and simultaneous bombardment of the growing films with low energy nitrogen ions. The multilayers were characterized by Auger electron spectroscopy (AES) depth profiles in order to get a quantitative analysis of the components in the different layers. In the interface BCN/CN, Factor Analysis was used to deconvolute the different chemical states of the components and to evaluate the physical and chemical characteristics of the multilayer with respect to their practical applications. In this work, we have studied the composition, morphology, hardness and wear resistance of the films. The mean grain size of the structures of the different coatings, as well as the root mean square (RMS) surface roughness, was measured by AFM.