The International Summer School on Vacuum, Electron and Ion Technologies (VEIT) has been organized biennially since 1978, when the series of VEIT Schools was launched by the Institute of Electronics, Bulgarian Academy of Sciences, with the aim to act as a forum for exchange and dissemination of knowledge and ideas on the latest developments in electron-, ion-, and plasma-assisted technologies. The organizers of the 2021 edition of the event were the Institute of Electronics, Bulgarian Academy of Sciences, Sofia, Bulgaria and the Dutch Institute for Fundamental Energy Research, Eindhoven, The Netherlands. The School is a major scientific event and a meeting place for young scientists involved in research and development associated with high-tech industries. Many former School participants went on to become successful scientists in their field of research in leading institutions and companies all over the world. The School Proceedings have been published in Special issues of the international journals Vacuum, Plasma Processes and Polymers, Journal of Physics: Conference Series.The twentieth-second edition of VEIT took place virtually via Zoom because of the COVID-19 pandemic, from 20 to 24 September 2021. It was attended by 106 participants (24 students and young researchers) from 16 countries on three continents: Algeria, Bulgaria, Czech Republic, France, Germany, Italy, Japan, Latvia, Portugal, Serbia, Slovakia, Sweden, Switzerland, The Netherlands, Ukraine, USA.