In high-temperature reverse-bias test of an insulated-gate bipolar transistor module, the problem of self-heating in chip resulting from power loss arises with high frequency. To address this problem, the law of the variation in leakage current with temperature for the reverse-bias state of a device is derived and utilized to establish a temperature calibration curve, with which the online measurement of the insulate-gate bipolar transistor module chip temperature can be implemented directly by real-time monitoring of device leakage current in high-temperature reverse-bias test. The method we proposed solves the problem of large measurement error in chip temperature obtained by traditional thermal resistance calculation method. In addition, real-time chip temperature can be monitored without introducing additional test circuit or HTRB interruption experiment. To demonstrate the effectiveness of the proposed method, the switching small-current temperature measurement method is used to make comparison, and the experiment result indicates that the temperature of the chip in the blocking test can be obtained with high precision by using the leakage current measurement method presented in this work.