In this study, the effect of thermal oxidation on the properties of the surface of titanium alloys was examined. Thermal oxidation was carried out at 750 °C within 6 hours, 800 °C within 5 hours, and 850 °C within 4 hours. Electrical resistance of the surface after thermal oxidation was measured. Metallographic analysis, microprobe analysis and X-ray phase analysis were carried out to determine the structure, chemical and phase compound of the oxide layer on the surface of titanium alloys after thermal oxidation. The results indicate that thermal oxidation leads to increase of electrical resistance of the surface of titanium alloys. Microstructural analysis showed that thickness of the oxide layer after thermal oxidation is in the range of 25 to 100 μm. Microprobe and X-ray phase analysis showed that TiO2 and Al2O3 oxides have the best impact on electrical resistance. Two variants of possible application of the results have been presented.