A new high-temperature lead-free solder joint which withstands up to 300°C utilizing superplasticity in the Al-Zn eutectoid alloy has been developed to realize SiC power semiconductor devices. The new solid state joining process consists of interfacial cleaning of joints utilizing superplasticity of the Al-Zn-eutectoid alloy at 250°C followed by diffusion bonding between 350 and 390°C. The bonding strength of the new joints exhibits almost the same value at the temperature range from RT to 300°C, above which it decreases slightly with increasing temperature. It is also found that the bonding strength of the new joints is 8 times as high as those of a high-temperature Pb-5wt%Sn-1.5wt%Ag solder and the Al-Zn eutectoid alloy solder without utilizing superplasticity at 250°C. The Al-Zn eutectoid alloy solder joint has shown high reliability in the temperature cycle testing between 50°C and 300°C up to 300 cycles.