The Mach–Zehnder electro-optic modulator (MZM) plays a crucial role in photonics integration technology during signal transmission. We propose the design and fabrication of a silicon-based electro-optic modulator based on the M-Z structure and design a modulator using silicon as the waveguide core layer on a silicon dioxide substrate. The detailed design involves a 1×2 splitter, branch waveguides, modulating arm waveguides, and a 2×1 combiner. The MZM fabrication and characterization results reveal that the half-wave voltage of the silicon-based MZM is 2 V, with an optical loss of −2.464dB and a device core size of 450µm×2800µm. The experimental results indicate that the MZM with a low half-wave voltage, a low loss, and high integration has significant value. The proposed MZM exhibits considerable improvements, featuring a low half-wave voltage and a low loss, and this device may serve as a fundamental component in wearable large-scale photonic integrated circuits for weak ECG real-time detection.
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