RB-SiC ceramic has greater specific stiffness and thermal stability as space optical materials in the field of deep space exploration. To ultra-precision grinding advanced manufacturing technology drawbacks, a fabrication of highly shape accuracy and surface quality and surface modification assisted processing at room temperature. The RB-SiC ceramics are modified by plasma torches to produce compounds with lower hardness values, an exceptional surface quality (Sa surface roughness of [0.481, 0.959]), and has excellent thermal and chemical stability after surface modification process via 100 °C plasma torch at room temperature environment, which makes it an ideal suitable for the deep space exploration conditions such as space optical materials. In addition, oxygen(O2) plasma surface modification and finite element simulation force-heat conduction of RB-SiC ceramic hard-brittle materials surface grinding force were compared with advanced manufacturing experiments of the precision grinding, revealing the formation mechanism and influence mechanism of surface micro-morphology during micro-cutting of precision grinding finish surface. The advanced manufacturing precision grinding difficulties of RB-SiC ceramic oxygen plasma torch reducing subsurface damage and removing space optical hard-brittle materials via ultra-precision grinding process of resin-funded corundum grinding wheel were solved. Subsurface damage (SSD) was effectively inhibited and its formation mechanism model.