Electric field assisted field monitoring laser drilling in transparent and hard brittle materials

Abstract

This study proposes using an external sensing electric field to design and analyze a sensing electrode to detect plasma induced by laser drilling and send the plasma signal to the controller in real-time through an embedded development system. The study found that, for single-point drilling detection on sapphire and quartz glass, the number of sensing pulses for real-time detection increased by 67.4% on average compared to when the focus position was unchanged. The average sensing drilling depth also increased by 132.96%. Additionally, results for sapphire 1 mm laser drilling showed that real-time detection reduced the average opening diameter by 8.04%, increased the average outlet diameter by 336.2%, reduced the average time by 61.8%, and reduced the average taper angle by 18.6%. For quartz glass single-point drilling detection, the number of sensing pulses for real-time detection increased by 12.64% on average compared to when the focus position was unchanged. The sensing hole depth also increased by an average of 14.97%. Results for quartz glass 1 mm laser drilling showed that real-time detection reduced the average opening diameter by 11.8%, increased the average outlet diameter by 48.7%, reduced the average time by 47.2%, and reduced the average taper angle by 32.8%.