This paper describes our programme to develop and demonstrate ultra-high performance single flux quantum (SFQ) VLSI technology that will enable superconducting digital processors for petaFLOPS-scale computing. In the hybrid technology, multi-threaded architecture, the computational engine to power a petaFLOPS machine at affordable power will consist of 4096 SFQ multi-chip processors, with 50 to 100 GHz clock frequency and associated cryogenic RAM. We present the superconducting technology requirements, progress to date and our plan to meet these requirements. We improved SFQ Nb VLSI by two generations, to a 8 kA cm−2, 1.25 µm junction process, incorporated new CAD tools into our methodology, demonstrated methods for recycling the bias current and data communication at speeds up to 60 Gb s−1, both on and between chips through passive transmission lines. FLUX-1 is the most ambitious project implemented in SFQ technology to date, a prototype general-purpose 8 bit microprocessor chip. We are testing the FLUX-1 chip (5K gates, 20 GHz clock) and designing a 32 bit floating-point SFQ multiplier with vector-register memory. We report correct operation of the complete stripline-connected gate library with large bias margins, as well as several larger functional units used in FLUX-1. The next stage will be an SFQ multi-processor machine. Important challenges include further reducing chip supply current and on-chip power dissipation, developing at least 64 kbit, sub-nanosecond cryogenic RAM chips, developing thermally and electrically efficient high data rate cryogenic-to-ambient input/output technology and improving Nb VLSI to increase gate density.
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