SiC is a promising material for high-power and hightemperature electronics due to its chemical inertness, high thermal conductivity (∼5 W cm−1 K−1), and wide band gap (2.4–3.3 eV, depending on the polytype). SiC diodes, field effect transistors, as well as bipolar homojunction transistors fabricated to date, showed that their performance exceeds even theoretical limits of Si and GaAs counterparts [1, 2]. Heterojunction devices can offer improved efficiency compared to the homojunction devices [3]. Koitzsch et al. suggested a waferbonding technique [4] to fabricate higher efficiency heterojunction devices using different SiC polytypes [5]. The interface obtained during bonding will determine the device operation. This work focuses on transmission electron microscopy (TEM) studies of the bonded SiC/SiC interfaces. In all bonding experiments, on-axis Si-face (0001) SiC wafers (either 6H or 4H) obtained from Cree, Inc., were used. The root-mean-square (RMS) surface roughness of as-received SiC wafers was measured by atomic force microscopy (AFM) using a Digital Instruments D3000 microscope. These measurements revealed an RMS surface roughness of ∼2 nm, which is higher than the 0.5 nm limit required for room temperature bonding [4]. Fig. 1 shows an AFM image of a typical SiC surface. Dark lines in the image correspond to the polishing scratches. The macroscopic surface roughness (waviness) of SiC wafers was studied on a Zygo GPI XP Laser Interferometer. Although the observed surface profile (Fig. 2) varied from wafer-to-wafer, the value for the peak-to-valley waviness was consistently 5–7 μm for our 12 × 22 mm2 samples. This is similar to the waviness of similarly sized Si samples, which was measured to be 3–6 μm. This level of macroscopic flatness was found suitable for the well-established Si/Si (or Si/SiO2) wafer bonding and thus was not expected to create any major obstacles in bonding of SiC wafers. To prepare particle-free samples for our bonding experiments, all wet cleaning procedures were performed in a class 100 clean-room environment. SiC samples were ultrasonically cleaned in BakerClean©R solution for 10 min, in 10% hydrofluoric acid for 10 min, in BakerClean©R solution for another 10 min, in deionized water for 1–3 min, and finally blow-dried with nitrogen. The final cleaning procedure was performed in a
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