Fabrication Errors Research Articles

Effects of electrolyte flow direction on height difference in electroplated Cu microstructures for fine-pitch RDL

As demand for high-performance and efficient semiconductor chips surges, advanced packaging technologies, such as heterogeneous integration and vertical stacking, are becoming increasingly significant. Among these, the redistribution layer (RDL), essential for connecting chips or packaging elements, is being designed with finer line/space dimensions to meet the growing requirements for I/O access. However, as the width of copper lines decreases to several microns, various fabrication errors arise. Notably, variation in electroplated copper height becomes a significant issue, impacting the overall process. This study analyzes the height deposition differences in copper electroplating that occur at fine-pitch lines (width: 3–11 μm) and proposes a method to mitigate height deviations by adjusting the flow direction of the electrolyte. The results indicate that the deposition height difference between the 3 μm and 11 μm width patterns was reduced from 40% to less than 10%, demonstrating improved reliability in the RDL process by enhancing the uniformity of plating heights across both wide and narrow patterns.

The Design of Highly Reflective All-Dielectric Metasurfaces Based on Diamond Resonators

All-dielectric metasurfaces offer a low-loss alternative to plasmonic metasurfaces. We proposed the configuration for high-reflectivity all-dielectric metasurfaces based on single-crystal diamond (SCD) resonators on fused silica substrate and conducted simulations to optimize and analyze such a configuration via the FDTD solver. We utilized GMR as the design principle to select the configuration and the substrate material, and analyzed the scattering properties of a single SCD resonator by multipole decomposition. Then, we demonstrated that both the cylindrical resonators in square lattice and frustum-shaped resonators in hexagonal lattice can achieve near-unity reflectivity (>99.99%) and ultra-low absorption (<0.001%) at 795 nm, the typical alkali-metal laser wavelength. Additionally, we demonstrated that such a design is quite tolerant of fabrication errors and further supports its potential for realistic applications. To expand the functionality of such devices across multiple wavelengths, dual-band high-reflectivity metasurfaces at 744 nm and 828 nm were also designed. Our work is quite useful for designing diamond-based highly reflective mirrors, paving the way for low-loss all-dielectric reflective metasurfaces in high-power laser applications.

Topological State in Heterostructured Gap Waveguides and Their Transitions to Classical Transmission Line

AbstractGap waveguides play a crucial role in millimeter‐wave information transmission and processing for next‐generation wireless communication and radar sensing systems. However, they suffer from challenges, such as reflection and scattering losses at sharp bends and defects. While topological photonic crystals offer innovative solutions for robust signal transmission, their localized interface states and unique electromagnetic modes pose compatibility challenges with practical circuits and systems. In this paper, a novel heterostructured gap waveguide support valley‐locked topological guided wave transport is introduced. This design ensures robust propagation against defects and bends while maintaining compatibility with classical transmission lines. Its topological characteristic reduce sensitivity to fabrication and assembly errors. More importantly, an efficient transition structure is developed to seamlessly convert quasi‐transverse electromagnetic (quasi‐TEM) modes in planar transmission lines to topological guided wave states, thereby effectively exciting topological waves. All theoretical predictions are quantitatively verified by the simulations and experiments at millimeter wave frequency. This heterostructured gap waveguide can find unique applications, such as power divider, as verified numerically. By leveraging topological principles, the proposed gap waveguide offers a significant performance boost for antennas and passive/active components in millimeter‐wave applications, including automotive radar, 5G communication, and synthetic‐aperture radar for imaging.

A fixed phase tunable directional coupler based on coupling tuning

The field of photonic integrated circuits has witnessed significant progress in recent years, with a growing demand for devices that offer high-performance reconfigurability. Due to the inability of conventional tunable directional couplers (TDCs) to maintain a fixed phase while tuning the reflectivity, Mach-Zehnder interferometers (MZIs) are employed as the primary building blocks for reflectivity tuning in constructing large-scale circuits. However, MZIs are prone to fabrication errors due to the need for perfect balanced directional couplers to achieve 0-1 reflectivity, which hinders their scalability. In this study, we introduce a design of a TDC based on coupling constant tuning in the thin film Lithium Niobate platform and present an optimized design. Our optimized TDC design enables arbitrary reflectivity tuning while ensuring a consistent phase across a wide range of operating wavelengths. Furthermore, it exhibits fewer bending sections than MZIs and is inherently resilient to fabrication errors in waveguide geometry and coupling length compared to both MZIs and conventional TDCs. Our work contributes to developing high-performance photonic integrated circuits with implications for various fields, including optical communication systems and quantum information processing.

All-optical reconfigurable optical neural network chip based on wavelength division multiplexing.

Optical computing has become an important way to achieve low power consumption and high computation speed. Optical neural network (ONN) is one of the key branches of optical computing due to its wide range of applications. However, the integrated ONN schemes proposed in previous works have some disadvantages, such as fixed network structure, complex matrix-vector multiplication (MVM) unit, and few all-optical nonlinear activation function (NAF) methods. Moreover, for the most compact MVM schemes based on wavelength division multiplexing (WDM), it is infeasible to employ intrinsic nonlinear effects to implement NAF, which brings frequent O-E-O conversion in ONN chips. Besides, it is also hard to realize a reconfigurable ONN with coherent MVMs, while it is much easier to implement in WDM schemes. We propose for the first time an all-optical silicon-based ONN chip based on WDM by adopting a new adjustment mechanism: optical gradient force (OGF). The proposed scheme is reconfigurable with tunable layers, variable neurons per layer, and adjustable NAF curves. In the task of classification of the MNIST dataset, our chip can realize an accuracy of 85.13% with 4 full-connected layers and only 50 neurons in total. In addition, we analyze the influence of the OGF-based NAF under fabrication errors and propose a calibration method. Compared to the previous works, our scheme has the two-fold advantages of compactness and reconfiguration, and it paves the way for the all-optical ONN based on WDM and opens the path to unblocking the bottleneck of integrated large-dimension ONNs.

Modeling of Fabrication Errors Caused by Operator Habits in Substrate Alignment Process

Modeling of Fabrication Errors Caused by Operator Habits in Substrate Alignment Process

Optimization of highly sensitive three-layer photonic crystal fiber sensor based on plasmonic

In this work, a photonic crystal fiber (PCF) refractive index (RI) sensor has been designed and optimized. The RIs range covered by the sensor is from 1.38 to 1.41. The proposed optical sensor has three layers of air holes with 24, 12 and 6 holes in each layer. The geometry parameters of the proposed sensor (the radius of the air holes and the thickness of the plasmonic layer) have been optimized using the Nelder-Mead algorithm and the FEM numerical with the objective of achieving the highest sensitivity. To achieve an optimized structure with minimal sensitivity to fabrication errors, the rotation angle of the hole layers has been analyzed. The results indicate that, due to the specific geometry of the proposed structure, variations in the rotation angle and displacement of the air holes have no significant impact on the outcomes. The results also indicate that the sensor’s maximum amplitude sensitivity (AS), maximum wavelength sensitivity (WS), and figure of merit (FOM) are 10000 (RIU−1), 23000 (nm/RIU) and 131 (RIU−1) respectively. The optimized design provides high sensitivity, a wide diagnostic range for the detection of the analytes’ RIs, and the advantages of a gold plasmonic layer, ensuring high stability in biological environments. This combination results in enhanced performance of the sensor for various applications particularly in biosensing and medical fields. The designed structural geometry also eliminates the effects of tolerances in manufacturing processes which makes the proposed PCF device a very efficient sensor.

Photonic crystal topological interface state modulation for nonvolatile optical switching

Phase change materials (PCMs), characterized by high optical contrast (Δn>1), nonvolatility (zero static power consumption), and quick phase change speed (∼ns), provide new opportunities for building low-power and highly integrated photonic tunable devices. Optical integrated devices based on PCMs, such as optical switches and optical routers, have demonstrated significant advantages in terms of modulation energy consumption and integration. In this paper, we theoretically verify the solution for a highly integrated nonvolatile optical switch based on the modulation of the topological interface state (TIS) in the quasi-one-dimensional photonic crystal (quasi-1D PC). The TIS exciting wavelength changes with the crystalline level of the PCM. The extinction ratio (ER) of the topological optical switch is over 18 dB with a modulation length of 9 μm. Meanwhile, the insertion loss (IL) can be controlled within 2 dB. Furthermore, we have analyzed the impact of fabrication errors on the device’s performance. The obtained results show that, the topological optical switch, which changes its “on/off” state by modulating TIS, exhibits enhanced robustness to the fabrication process. We provide an interesting and highly integrated scheme for designing the on-chip nonvolatile optical switch. It offers great potential for designing highly integrated on-chip optical switch arrays and nonvolatile optical neural networks.

Design of fabrication-tolerant meta-atoms for polarization-multiplexed metasurfaces

Metasurfaces can replace bulk optical components in a more compact form factor in applications including communication systems, sensors, and manufacturing technology. However, their design and fabrication is challenging due to competing demands of selecting meta-atoms that simultaneously provide the required amplitude and phase modulation while being robust to fabrication errors. Here, we develop two design heuristics to assist with the down-selection of meta-atoms into sensitivity-informed libraries, based on either selecting meta-atoms with minimal sensitivity or minimizing the relative sensitivities between meta-atoms. We evaluate both methods on a polarization-dependent phase mask and compare the resulting phase and intensity errors.Graphical

Absolute testing of rotationally symmetric surfaces with computer-generated holograms.

Extremely high accuracy is demanded for optics working at very short wavelength. Interferometric testing of optical aspheres or freeform surfaces requires null optics, typically computer-generated holograms (CGHs), to balance the wave aberrations. The measurement uncertainty is primarily limited by the accuracy of the test wavefront, which is predominantly influenced by the CGH and the interferometer optics. Absolute testing is fundamental to achieving accuracy much higher than that of the test wavefront through error separation. This paper presents a method for absolute testing of rotationally symmetric surfaces with CGH null optics. The basic assumption is that the off-axis hologram fabricated by raster scanning beam writing has negligible error of rotationally symmetric component due to pattern error of the CGH. Consequently, the wavefront error contributed by the CGH and the transmission flat can be completely separated from the absolute surface shape by combining the N-position method and the shift-rotation method. A theoretical model for absolute testing is proposed under the assumption. Experimental cross test is then presented to validate the method with sub-nanometer uncertainty. The assumption is further confirmed by characterizing the fabrication error of the hologram structures using a white light interferometer. Finally, the effect of noise, translation error, rotation error and eccentricity of rotation on the absolute testing is analyzed.

Research on multi-resonance mechanism to achieve ultra-wideband high absorption of a metamaterial absorber in the UV to MIR range

Wideband metamaterial perfect absorbers have been extensively researched due to their excellent properties. A four-layer ultra-broadband metamaterial perfect absorber engraved with a square cavity is proposed. A clever combination of grating and square cavity allows the absorber to manifests an overall absorption of over 92 % and an average absorption rate of 97.27 % within the operational band from 280 to 5400 nm. Through analysis, it can be concluded that the coupling effects of Rayleigh anomaly (RA), magnetic resonance (MR), cavity resonance (CR), propagating surface plasmon resonance (PSPR) and local surface plasmon resonance (LSPR) result in perfect absorption. The absorber is insensitive to polarization and large angle incidence. It is worth mentioning that the average absorption rate of our structure reaches 93.32 % at a large incidence angle of 60° in TE mode, which is much higher than that of other absorbers. At 1000 K, the total photothermal conversion efficiency of our absorber is still above 90 %. The designed structure has the following advantages: high absorption, ultra-wide bandwidth, high tolerance to fabrication errors and insensitivity to large angle incidence. Thus, the absorber can be used in the solar energy harvesting and perfect stealth. Additionally, it also can be served as a reference in thermophotovoltaics, thermal imaging and infrared detection.

All-Diamond Boron-Doped Microelectrodes for Neurochemical Sensing with Fast-Scan Cyclic Voltammetry.

Neurochemical sensing with implantable devices has gained remarkable attention over the last few decades. A promising area of this research is the progress of novel electrodes as electrochemical tools for neurotransmitter detection in the brain. The boron-doped diamond (BDD) electrode is one such candidate that previously has been reported for its excellent electrochemical properties, including a wide working potential, superior chemical inertness and mechanical stability, good biocompatibility and resistance to fouling. Meanwhile, limited research has been conducted on the BDD as a microelectrode for neurochemical detection. Our team has developed a freestanding, all diamond microelectrode consisting of a boron-doped polycrystalline diamond core, encapsulated in an insulating polycrystalline diamond shell, with a cleaved planar tip for electrochemical sensing. This all-diamond electrode is advantageous due to its - (1) batch fabrication using wafer technology that eliminates traditional hand fabrication errors and inconsistencies, (2) absence of metal-based wires, or foundations, to improve biocompatibility and flexibility, and (3) sp 3 carbon surface with resistance to biofouling, i.e. adsorption of proteins or unwanted molecules at the electrode surface in a biological environment that impedes overall electrode performance. Here, we provide findings on further in vitro testing and development of the freestanding boron-doped diamond microelectrode (BDDME) for neurotransmitter detection using fast scan cyclic voltammetry (FSCV). In this report, we elaborate on - 1) an updated fabrication scheme and work flow to generate all diamond BDDMEs, 2) slow scan cyclic voltammetry measurements of reference and target analytes to understand basic electrochemical behavior of the electrode, and 3) FSCV characterization of common neurotransmitters, and overall favorability of serotonin (5-HT) detection. The BDDME showed a 2-fold increased FSCV response for 5-HT in comparison to dopamine (DA), with a limit of detection of 0.16 µM for 5-HT and 0.26 µM for DA. These results are intended to expand on the development of the next generation BDDME and guide future in vivo experiments, adding to the growing body of literature on implantable devices for neurochemical sensing.

Effect of the scanner type on the marginal gap and internal fit of two monolithic CAD/CAM esthetic crown materials: An in vitro study.

The durability of indirect restorations is significantly influenced by marginal adaptation and internal fit. The use of computer-aided design/computer-aided manufacturing (CAD/CAM) with digital impressions has reduced dental prosthesis fabrication errors, improving the long-term survivability of the restorations. The present study assessed the impact of intraoral and extraoral scanning methods on the marginal adaptation and internal fit of 2 different types of monolithic crowns manufactured using CAD/CAM. A total of 40 three-dimensional (3D) resin-printed dies were randomly assigned to 2 groups based on the type of crown material (n = 20 per group). Each group was divided into 2 subgroups (n = 10 per group) according to the die-scanning technique: subgroup A, scanned using the intraoral scanner (IOS) Primescan; and subgroup B, scanned using the extraoral scanner (EOS) inEos X5. The digitized photos were converted into a 3D virtual crown design using CAD software. The internal discrepancy values, and the marginal gap between the 3D resin-printed die and the crown were assessed using a ×50 digital microscope. The data was checked for normality with the Kolmogorov-Smirnov test, and the Mann-Whitney U test was used to compare the tested groups. The collected data was analyzed at a significance level set at p < 0.05. The different scanning techniques used had a statistically significant effect on the vertical marginal gap and the internal fit [μm] (p < 0.05). As far as the crown materials are concerned, BRILLIANT Crios showed a significantly higher marginal gap as compared to Tetric CAD when scanned with inEos X5 (p = 0.004), whereas the differences were insignificant with regard to the internal fit (p > 0.05).The crown parameters tested with both scanning systems were within the clinically acceptable ranges. Scanning methods and crown materials had an impact on the internal fit and vertical marginal gap of monolithic crowns.

Implementation of a high-resolution micro-grating accelerometer using a subdivision interpolation technique

This paper proposes a subdivision interpolation technique for an optical accelerometer based on diffraction grating interferometry. The diffraction light intensity curve presents a sine shape with the increase of the acceleration. To address the issues of linearization signal processing across the entire range, a subdivision interpolation circuit is employed, in conjunction with a 90° phase shift and high-precision DC bias-voltage techniques, converting an analog signal with sinusoidal characteristics from the photodetector into standard incremental digital signals that vary linearly over the full range. The novel methodology, to the best of our knowledge, ensures that its performance is least affected by the phase imbalance, offset error, and amplitude mismatch induced by fabrication and alignment errors of the grating, achieving high-resolution digital signal output. The experiment results reveal that the optical accelerometer based on grating interferometry achieved a sensitivity of 85.2 V/g, a resolution of 137.6 µg, as well as a subdivision interpolation factor of 45. This work provides a significant guide for the development of high-resolution MOEMS accelerometers in practical applications.

High-performance ultra-simple solar absorber with extremely high tolerance for fabrication errors

Broadband metamaterial perfect absorbers have drawn considerable attention from researchers for a broad range of applications in electromagnetic stealth, solar energy harvesting and other fields. However, it is extremely challenging to integrate the excellent characteristics of ultra-broadband, perfect absorption, polarization independent, and insensitivity to wide incidence angles into a structurally simple absorber. Herein, we present an ultra-wideband solar perfect absorber with an ultra-simple structure, which consists of a Si3N4-Ti-Si3N4-Ti four-layer structure. The optimized structure offers more than 92 % absorption in the bandwidth range of 450–2750 nm, and the average absorption is up to 97.3 %. Moreover, we elaborate the physical mechanism to achieve the broadband perfect absorption. For solar thermal systems, the absorber is capable of absorbing 95.7 % of the sunlight, its blackbody radiation absorption is as high as 98.0 % at 1900 K and it has a photothermal conversion efficiency of 90.2 % at 1000 K. Furthermore, the absorber displays the characteristics of being independent of polarization and insensitive to wide incidence angles. Additionally, the absorber possesses a very high tolerance for manufacturing errors. It is shown that the designed absorber is ultra-simple in structure and excellent in performance, and has excellent application prospects in fields including solar thermal conversion.

Effects of Defects on the Properties of Polymer Nanocomposites: A Brief Review

AbstractPolymer nanocomposites are promising materials for various applications in the electronics, biomedicine, and aerospace industries. However, the fabrication errors or defects, e.g., induced porosity, significantly impact the performance and the reliability of devices fabricated from polymer nanocomposites. Hence, this study has comprehensively carried out an investigation into the effects of defects on the properties of photovoltaic active cells, biomimetic scaffold, and aircraft structures that are fabricated by using polymer nanocomposites. Agglomeration is another defect that degrades the intended properties of polymer nanocomposite devices. For photovoltaic devices, defects can be controlled by the selective modification of organic semiconductor molecular structures. In addition, proper optimization of the process parameters and the material selection, are effective approaches for obtaining excellent photovoltaic cells. Furthermore, the presence of impurities, a non-homogeneous mixture of organic and inorganic materials, and the incomplete solubility of nanoparticles, are detrimental factors that affect the cell proliferation performance of biomimetic scaffolds. These technological imperfections must be also avoided when producing parts for aircraft structures. In other words, impurities introduced during the synthesis or processing stages can lead to irregularities in the material structure, which often affect its mechanical, electrical, biomedical, and optical properties. The understanding and mitigating of these factors are crucial for the optimization of the properties and performance of polymer nanocomposites in various applications.

Broadband and fabrication-tolerant 3-dB couplers with topological valley edge modes

3-dB couplers, which are commonly used in photonic integrated circuits for on-chip information processing, precision measurement, and quantum computing, face challenges in achieving robust performance due to their limited 3-dB bandwidths and sensitivity to fabrication errors. To address this, we introduce topological physics to nanophotonics, developing a framework for topological 3-dB couplers. These couplers exhibit broad working wavelength range and robustness against fabrication dimensional errors. By leveraging valley-Hall topology and mirror symmetry, the photonic-crystal-slab couplers achieve ideal 3-dB splitting characterized by a wavelength-insensitive scattering matrix. Tolerance analysis confirms the superiority on broad bandwidth of 48 nm and robust splitting against dimensional errors of 20 nm. We further propose a topological interferometer for on-chip distance measurement, which also exhibits robustness against dimensional errors. This extension of topological principles to the fields of interferometers, may open up new possibilities for constructing robust wavelength division multiplexing, temperature-drift-insensitive sensing, and optical coherence tomography applications.

Influence of Fabrication and Assembly Errors on the Root Mean Square Surface Distortion of a 2 m Lightweight Mirror and Its Correction

Influence of Fabrication and Assembly Errors on the Root Mean Square Surface Distortion of a 2 m Lightweight Mirror and Its Correction

Avoiding lateral mode leakage in thin film lithium niobate waveguides for the generation of spectrally pure photons at telecom wavelengths

Photonic integrated optical components, notably straight waveguides, serve as pivotal elements for on-chip generation and manipulation of quantum states of light. In this work, we focus on optimizing waveguides based on lithium niobate on insulator (LNOI) to generate photon pairs at telecom wavelengths using spontaneous parametric down-conversion (SPDC). Specifically, we investigate lateral leakage for all possible SPDC processes involving type 0, type I, and type II phase matching conditions in an X-cut lithium niobate waveguide and provide a recipe to avoid leakage loss for the interacting photons. Furthermore, focusing on type II phase matching, we engineer the waveguide in the single-mode regime such that it also satisfies group index matching for generating spectrally pure single photons with high purity (99.33%). We also address fabrication imperfections of the optimized design and find that the spectral purity of the generated photons is robust to fabrication errors. This work offers guidance for the suitable selection of morphological parameters to obtain lossless, single-mode LNOI waveguides for building linear optical circuits and photon pair generation at telecom wavelengths using desired phase-matching conditions.

Orbital angular momentum mode multiplexing communication in multimode fibers

Vortex beams with orbital angular momentum (OAM) have infinite mode orthogonality, which can greatly boost communication capacity through mode-division multiplexing. However, current exploration of OAM beam transmission primarily focuses on free-space or specialty fibers limited by the OAM spiral phase wavefront characteristics. Due to the mode field phase sensitivity, these methods are constrained by turbulence interference and fabrication error tolerance, restricting transmission distance of OAM beam at practical application. Herein, we propose an OAM transmission scheme using commercial multimode fiber (MMF) exploiting the eigenmodes superposition theory. Leveraging linear superposition of HE and EH vector modes with ± (π/2) phase shift over MMF, OAM excitation and transmission can be supported with low interference. Simultaneously, due to the decreased demand for fabrication precision in the gradient core structure, the tolerance for machining errors is enhanced. As a proof-of-concept, we have demonstrated a multidimensional OAM multiplexing communication with 640-channel (4 OAM modes, 80 wavelengths and 2 polarization states) over a 5 km MMF, successfully transmitting QPSK-OFDM signals at a total rate of 15 Tbit/s. The system demonstrated OAM mode purity exceeding 65% and bit error rate (BER) below the forward error correction (FEC) threshold (3.8 × 10−3). Multiplexed OAM signals can be effectively transmitted in MMF over short to medium distances with acceptable mode crosstalk, while remaining compatible with wavelength and polarization dimensions, enabling the construction of multi-dimensional multiplexing local area networks.