Abstract
X-ray microscopy is very promising not only for nondestructive and high-spatial-resolution observation of the internal structure of a sample but also for elemental distribution and chemical state analysis. However, the spatial resolution of microscopes remains unsatisfactory owing to the fabrication error in the objective lens. To realize an ultra-high-resolution, we propose and develop a monolithic deformable mirror based on a lithium niobite single crystal and a novel adaptive imaging system based on it. An X-ray interferometer confirmed that shape modification is possible with an accuracy of 0.67 nm in peak to valley under high stability (0.17 nm over 7 h) and hysteresis-free deformation control. Introducing this adaptive mirror into an X-ray microscope based on advanced Kirkpatrick-Baez mirror optics and correcting the wavefront aberration demonstrated that the X-ray image quality could be significantly improved.
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