Volatile organic compounds (VOCs) are directly associated with human health concerns and environment safety. Therefore, it is urgent to achieve an accurate detection of VOCs both qualitatively and quantitatively. In this work, the qualitative detection of ethyl benzene (EB), isopropyl alcohol (IPA), ethyl acetate (EA) – three pure VOCs in liquid phase were discussed using terahertz (THz) microfluidic Electromagnetic Induced Transparency (EIT) meta-sensor. The THz response illustrated that with an increase in VOCs’ volumes (1~6μL), resonant frequencies of dual transmission dips (0.855, 1.724 THz) and the EIT peak (1.213THz) exhibited red shift. The limit of detections for pure IPA, EA, EB can achieve 5.45μg, 13.46μg, 4.35μg, respectively. The multivariate fusion (MF) model based on the EIT responses to VOCs was utilized to improve the accuracy of trace detection and classification of VOCs. Furthermore, the above method combined with principal component analysis with Gaussian mixture model (PCA-GMM) and the neural network classification algorithm support vector machine (SVM) was applied to the recognition of VOCs. In addition, the THz method is not feasible to detect trace amounts of VOCs (typically 0.3mg/L) in waste water because water is highly absorbable in THz band and VOCs will evaporate if water is removed. Here, IPA, EA, EB in soil were detected and classified by PCA-GMM combined with MF. Our results provide a new terahertz meta-sensor platform to trace detection of VOCs in liquid phase and in soil and may be used to identify hazardous wastes in illegal dumping.