The in-depth resolution reached with a Grimm discharge can apparently be improved by using a discharge in a hollow cathode. It is known that the minimal width of the analyzed layer depends on the sensitivity of the determination of the element studied, With a cooled hollow cathode the sensitivity of the determination is higher than with the Grimm discharge, because of the more effective excitation of the sample analyzed [8, 9]. This procedure for improving the in-depth resolution was the subject of the present investigation, A direct spectral analysis was carried out in a negative glow discharge in a hollow cathode. The sample of the film on an electroconducting support was placed at the bottom of a cooled hollow cathode made of a highly-pure aluminum, which is more difficult to sputter than the films we studied. The energy of argon (or neon) ions bombarding the layer is about 3,102 eV [i0], and the depth of penetration of the ions does not exceed a few angstroms [4]. The density of the ionization current was 10-24 mA/cm 2. The main possible use of the cooled hollow cathode for the layer-by-layer analysis was studied for the analysis of antimony and bismuth chloride films. Alternating layers of antimony and bismuth chlorides were deposited on a graphite support. The thickness of each chlo ~ ride layerwas determined gravimetrically, and was ~i0 "'~ cm. A vacuum of i0 -~ torr was cre~ ated in the light source, and then argon was passed in to a pressure of 0,5-1 torr, and discharge was ignited. Figure 1 shows thechange in the analytical signal of antimony (first maximum), bismuth (second maximum) and carbon (right-hand branch of the curve). We used the lines of Sb I 259, 8 nm, Bi I 306, 7 nm, C I 324, 7 nm as the analytical lines, and the background served as the reference line. It is seen that the uniformity of etching the layers and the in-depth resolution are sufficient for a separate layer-by-layer analysis of films =10 -6 cm thick. The discharge with the hollow cathode was used for layer-by-layer analysis of the composition of the oxide film on the surface of chromium steel. This problem is interesting for the study of the properties of materials and alloys which are fairly stable at high temperatures, and in different types of media. Corrosion leads to a change in the composition of the surface film, and therefore the composition and thickness of the film are the indicators of the corrosion resistance of the material, Steels with different chromium content (from 8 to 18%) were analyzed. The layer-bylayer analysis was carried out also with films obtained when these steels were oxidized at a temperature of 900~ in an atmosphere for 1-2 h. As standards in the analysis of a surface of steel which was not subjected to oxidation, we used a set of standard samples No. 54 for the spectral analysis of steels, as well as sam
Read full abstract