Design Of Pressure Sensor Research Articles

MEMS capacitive pressure sensor: analysis, theoretical modeling, simulation and performance comparison of the effect of a conical notch

Abstract Micro-Electro-Mechanical Systems (MEMS) pressure sensors are widely used in various applications due to their high sensitivity, low power consumption, and compactness. This work involves the design and simulation of a MEMS-based Touch Mode Capacitive Pressure Sensor (TMCPS). The proposed sensor is based on a substrate with an integrated conical notch featuring a circular diaphragm, aiming to enhance the key performance parameters of the sensor. The integration of a conical notch in the substrate increases the touch area between the diaphragm and substrate compared to the literature, ensuring increased capacitance and capacitive sensitivity. In this work the mathematical analysis of deflection of a circular diaphragm employing thin plate theory, capacitance, and capacitive sensitivity, along with step-by-step explanations, is provided. The results are obtained from MATLAB simulations. The deflection of the diaphragm is validated through Finite Element Analysis (FEA) using COMSOL Multiphysics. The proposed work demonstrates a significant improvement in sensor sensitivity compared to the existing literature.

Modeling and Simulation of 2D Transducers Based on Suspended Graphene-Based Heterostructures in Nanoelectromechanical Pressure Sensors.

Graphene-based two-dimensional (2D) heterostructures exhibit excellent mechanical and electrical properties, which are expected to exhibit better performances than graphene for nanoelectromechanical pressure sensors. Here, we built pressure sensor models based on suspended heterostructures of graphene/h-BN, graphene/MoS2, and graphene/MoSe2 by using COMSOL Multiphysics finite element software. We found that suspended circular 2D membranes show the best sensitivity to pressures compared to rectangular and square ones. We simulated the deflections, strains, resonant frequencies, and Young's moduli of suspended graphene-based heterostructures under the conditions of different applied pressures and geometrical sizes, built-in tensions, and the number of atomic layers of 2D membranes. The Young's moduli of 2D heterostructures of graphene, graphene/h-BN, graphene/MoS2, and graphene/MoSe2 were estimated to be 1.001 TPa, 921.08, 551.11, and 475.68 GPa, respectively. We also discuss the effect of highly asymmetric cavities on device performance. These results would contribute to the understanding of the mechanical properties of graphene-based heterostructures and would be helpful for the design and manufacture of high-performance NEMS pressure sensors.

Ultrahighly Sensitive Flexible Pressure Sensors with Dual-Mode Response Based on Monolayer Films of Calcium Niobate Nanosheets.

Flexible pressure sensors present enormous potential for applications in health monitoring, human-machine interfacing, and electronic skins (e-skin). However, at the cost of flexibility, the design of flexible pressure sensors has been facing the trade off between high sensitivity and wide sensing range. Herein, we propose a sandwiched structure composed of monolayer films of calcium niobate nanosheets to endow the device with both ultrahigh sensitivity and a wide sensing range. Tunable contact between the two electrodes of the pressure sensor through the gaps in the insulative monolayer film and precise thickness modulation of the monolayer films at the nanoscale result in an ultrahigh sensitivity and wide sensing range of the sensors. By virtue of these two traits, the pressure sensor distinguishes itself with unprecedented performances of ultrahigh sensitivity (6.43 × 104 kPa-1), a wide sensing range (1.94-60.00 kPa), a fast response time (<165 ms), and reliable repeatability. In addition, the sensor has a sensing mechanism transition from capacitive mode to piezoresistive mode from low pressure to high pressure. The sensors demonstrates the ability for motion detection of the human body. This work sheds light on the development of highly sensitive flexible pressure sensors.

A Design and Analysis of a Square Diaphragm-Comb Structure Capacitive Pressure Sensor (SD-CSCPS)

A Design and Analysis of a Square Diaphragm-Comb Structure Capacitive Pressure Sensor (SD-CSCPS)

An intrinsic electromechanical design method for MXene-based electrodes of ultra-highly sensitive and stable pseudocapacitive pressure device

To achieve the optimal performances of flexible pressure devices, the current approaches typically involve extensive experimental trials. However, such methods lack guidance from theoretical models in a positive fashion, not only introducing unpredictability and uncertainty into results but also potentially limiting the applicability of any achieved advancements to the alternative material systems. Here, an electrical-mechanical design model, combining density functional theory and molecular dynamics simulations, was proposed for calculating the specific capacitance and mechanical strength of various modified MXene films. Based on which, the optimal hybrid film entailed the cross-linking of holey reduced graphene oxide and MXene via cysteamine was prepared. This film, upon electromechanical characterizations, has effectively overcome the issues of MXene self-stacking and brittleness, thus validating the conclusions of theoretical predictions. Subsequently, the proposed film was integrated as electrode into a pseudocapacitive pressure sensor, achieving highly sensitivity (∼143,258 kPa−1) and mechanical stability (with capacitance drift below 1.2 % after 10,000-repeated test). Ultimately, the fabricated sensors were developed into sound collection system and robotic skins, respectively, to achieve recognition of distinctive sounds and stable perception of gravity. The calculation-based approach holds enormous potential for the design of two-dementional materials-based pressure sensors.

Rechargeable Self-Powered pressure sensor based on Zn-ion battery with high sensitivity and Broad-Range response

Flexible pressure sensors find broad applications in electronic skin, human–computer interaction, and health monitoring. However, developing self-powered flexible sensors capable of detecting both dynamic and static pressures with high sensitivity and a wide detection range remains a significant challenge. Here, we report the design and fabrication of a new rechargeable Zn-ion battery-type flexible self-powered pressure sensor (RZIB-FPS). In the device, the anode of a flexible Zn-ion battery is designed into a sandwich configuration with a porous isolation layer in between a conductive layer decorated with polymethylmethacrylate microspheres and a flexible Zn electrode. The self-powered pressure sensing mechanism relies on the variation in output voltage resulting from the resistance change of the anode when subjected to external pressure. This RZIB-FPS exhibits an open-circuit voltage of 1.46 V, an energy density of 392 µWh cm−2, a high sensitivity (up to 42.6 mV kPa−1), a wide pressure detection range (up to 330 kPa), and excellent cycling stability (up to 12,000 cycles). Furthermore, the proposed all-in-one device design demonstrates excellent charge–discharge performance, manifesting its high integration level and potential for sensor miniaturization. This study introduces a new strategy for developing high-performance sensors for future self-powered smart wearable electronics.

Mechanical Structure Design of Pressure Sensors with Temperature Self-compensation for Invasive Blood Pressure Monitoring

Abstract Invasive blood pressure (IBP) is a fundamental part of basic cardiovascular monitoring. Conventional piezoresistive pressure sensors are limited in usage due to the high cost associated with equipment and intricate fabrication processes. Meanwhile, low-cost strain gauge pressure sensors have poor performance in the gauge factor (GF) and temperature insensitivity. Here, we report a mechanical structure design for diaphragm pressure sensors (DPSs) by introducing a compensation grid to overcome the aforementioned challenges. A simplified model is established to analyze the mechanical deformation and obtain the optimal design parameters of the DPS. By rationally arranging the placement of sensitive grids to eliminate the discrepancy of relative resistance changes within four arms of the Wheatstone full-bridge circuit, the appropriate GF and high temperature insensitivity are simultaneously achieved. The blood pressure sensor with the DPS is then fabricated and characterized experimentally, which demonstrates an appropriate GF (ΔU/U0)/P = 3.56 × 10−5 kPa−1 and low temperature coefficient of voltage (ΔU/U0)/ΔT = 3.4 × 10−7 °C−1. The developed mechanical structure design offers valuable insights for other resistive pressure sensors to improve the GF and temperature insensitivity.

Rational design of a laminate-structured flexible sensor for human dynamic plantar pressure monitoring

Flexible sensors are essential components in emerging fields such as epidermal electronics, biomedicine, and human-computer interactions, and creating high-performance sensors through simple structural design for practical applications is increasingly needed. Presently, challenges still exist in establishing efficient models of flexible piezoresistive pressure sensors to predict the design required for achieving target performance. This work establishes a theoretical model of a flexible pressure sensor with a simple laminated and enclosed structure. In the modeling, the electrical constriction effect is innovatively introduced to explain the sensitization mechanism of the laminated structure to a broad range of pressures and to predict the sensor performance. The experimental results confirmed the effectiveness of the theoretical model. The sensor exhibited excellent stability for up to three million cycles and superior durability when exposed to salt solution owing to its simple laminated and enclosed structural design. Finally, a wearable sensing system for real-time collection and analysis of plantar pressure is constructed for exercise and rehabilitation monitoring applications. This work aims to provide theoretical guidance for the rapid design and construction of flexible pressure sensors with target performance for practical applications.

Novel Design of Double Touch Plano-Convex MEMS Capacitive Pressure Sensor: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison

Due to advancements in Micro-Electro-Mechanical Systems (MEMS) fabrication technologies, researchers are incorporating numerous innovations in the design of capacitive pressure sensors (CPS). This work aims to present a novel CPS design using a plano-convex substrate to enhance the capacitance and sensitivity. Diaphragm deflection occurs due to its elastic property when pressure is applied to the diaphragm. This deflection reduces the distance between the diaphragm and substrate, thereby remarkably increasing capacitance. The Plano-Convex design offers added advantages of increased contact area between the diaphragm and substrate under applied pressure, hence significantly enhancing sensor sensitivity and range. More efficient and miniaturized CPSs are in high demand in medical instrumentation, aerospace, aviation, power plants and automotive industries. This work presents all the required mathematical calculations, modeling and simulations to support the proposed design. The diaphragm deflection simulation concerning pressure is conducted using COMSOL Multiphysics, while MATLAB is employed for analytical simulations related to changes in capacitance and capacitive sensitivity.

Pressure-dependent bandgap characteristics in photonic crystals with sensing applications

The present study elucidates a photonic crystal (PhC)-based pressure sensor exploiting the change in refractive index with pressure and the corresponding structural deformation of the dielectric material. The stress-sensitive refractive indices of the constituent materials of the PhC have been considered to study the effect of applied pressure on the photonic bandgap (PBG) characteristics of the structure. The designed pressure sensor, proposed using a two-dimensional hexagonal lattice arrangement of air holes in a dielectric slab, operates in the high-pressure range of 1–6 GPa. A comparative study of the PBG characteristics with the application of high pressure has been reported for three semiconducting materials—GaAs, Ge and Si, used for the dielectric slab in the proposed structure. GaAs is found to exhibit the highest sensitivity to pressure variations and shows more pronounced shifting of the midgap wavelength with pressure in comparison to Ge and Si. The largest PBG is seen in the Ge-based structure, closely followed by the GaAs and Si-based structures. The proposed structure is suitable for high-pressure sensing applications.

Nonlinear Analysis of Electric Potential in a Piezoelectric Thin Plate as Pressure Sensor

Piezoelectric materials are widely applied in electronic components due to their ability to couple electric and mechanical fields. For the piezoelectric thin plate as a pressure sensor, we extend the modified first-order piezoelectric plate theory to explore the nonlinear solution of electric potential and discuss the relevant regulation mechanisms. Based on the piezoelectric effect, the electric potential generated by deformation is not linear with thickness. A quadratic function of electric potential across thickness is introduced. However, the electric potential on upper and lower electrodes is an unknown constant, which can be determined by the nonlinear complementary equation based on the Gauss theorem. It is shown that the nonlinear results of electric potential are consistent with outcomes by the three-dimensional finite element method. Furthermore, relevant regulation mechanisms are discussed on electric potential, including supported conditions, plate thickness, and load area. In addition, the influence of load locations on the electric potential response is analyzed. It is expected that these findings will be instructive to the structural design of piezoelectric pressure sensors.

Data-driven inverse design of flexible pressure sensors

Artificial skins or flexible pressure sensors that mimic human cutaneous mechanoreceptors transduce tactile stimuli to quantitative electrical signals. Conventional trial-and-error designs for such devices follow a forward structure-to-property routine, which is usually time-consuming and determines one possible solution in one run. Data-driven inverse design can precisely target desired functions while showing far higher productivity, however, it is still absent for flexible pressure sensors because of the difficulties in acquiring a large amount of data. Here, we report a property-to-structure inverse design of flexible pressure sensors, exhibiting a significantly greater efficiency than the conventional routine. We use a reduced-order model that analytically constrains the design scope and an iterative "jumping-selection" method together with a surrogate model that enhances data screening. As an exemplary scenario, hundreds of solutions that overcome the intrinsic signal saturation have been predicted by the inverse method, validating for a variety of material systems. The success in property design on multiple indicators demonstrates that the proposed inverse design is an efficient and powerful tool to target multifarious applications of flexible pressure sensors, which can potentially advance the fields of intelligent robots, advanced healthcare, and human-machine interfaces.

On the Development of a New Flexible Pressure Sensor.

The rapid advancement of the Internet of Things (IoT) serves as a significant driving force behind the development of innovative sensors and actuators. This technological progression has created a substantial demand for new flexible pressure sensors, essential for a variety of applications ranging from wearable devices to smart home systems. In response to this growing need, our laboratory has developed a novel flexible pressure sensor, designed to offer an improved performance and adaptability. This study aims to present our newly developed sensor, detailing the comprehensive investigations we conducted to understand how different parameters affect its behaviour. Specifically, we examined the influence of the resistive layer thickness and the elastomeric substrate on the sensor's performance. The resistive layer, a critical component of the sensor, directly impacts its sensitivity and accuracy. By experimenting with varying thicknesses, we aimed to identify the optimal configuration that maximizes sensor efficiency. Similarly, the elastomeric substrate, which provides the sensor's flexibility, was scrutinized to determine how its properties affect the sensor's overall functionality. Our findings highlight the delicate balance required between the resistive layer and the elastomeric substrate to achieve a sensor that is both highly sensitive and durable. This research contributes valuable insights into the design and optimization of flexible pressure sensors, paving the way for more advanced IoT applications.

Graphene resonant pressure sensor with ultrahigh responsivity-range product

Graphene has good mechanical properties including large Young’s modulus, making it ideal for many resonant sensing applications. Nonetheless, the development of graphene-based sensors has been limited due to difficulties in fabrication, encapsulation, and packaging. Here, we report a graphene nanoresonator-based resonant pressure sensor. The graphene nano resonator is fabricated on a thin silicon diaphragm that deforms due to pressure differential across it. The deformation-induced strain change results in a resonance frequency shift of the graphene nano resonator. The pressure sensing experiments demonstrate a record high responsivity of 20 kHz kPa−1 over a range of 270 kPa. The design has the potential to reach responsivities up to 500 kHz kPa−1. The reported responsivity is two orders of magnitude higher than the silicon-based resonant pressure sensors. The estimated resolution of pressure sensing is 90 Pa, which is 0.03% of the full-scale range of the pressure sensor. This exceptional performance is attributed to two factors: maintaining a high-quality vacuum environment for the nanoresonator and introducing stimuli through a thin silicon diaphragm. The proposed pressure sensor design provides flexibility to adjust responsivity, range and footprint as needed. The fabrication method is simple and has the potential to be integrated into the modern semiconductor foundries.

The Design and numerical simulation of a 3D-printed flexible capacitive pressure sensor with a composite structure

Abstract Flexible pressure sensors are crucial for many areas, such as electronic skins, human motion, robot monitoring, and medical treatment. However, conventional manufacturing methods limit the speed and accuracy of manufacturing sensor dielectric layers. In this paper, a unique capacitive pressure sensor with a composite structure is introduced that can be fabricated by 3D printing technology. The structure, which has 3D hierarchical pyramids microstructures and porous substrate, can be directly fabricated by a DLP 3D printer. This allows flexible dielectric layers to be fabricated quickly while maintaining their superior performance. The dimension of the produced sensor is 10×10×4.5 mm3. The sensor’s design process, numerical simulation, and performance are provided and elucidated. The performance of the sensor is measured between 0 and 1 MPa. It has low hysteresis and high sensitivity (6.83 MPa−1 within the scope of 0 to 0.5 MPa and 2.56 MPa−1 within the scope of 0.5 to 1 MPa).

Sensitivity enhanced flexible capacitive pressure sensor microstructure optimization for biomedical applications

This paper explores the design and optimization of Flexible Capacitive Pressure Sensors (FCPS) using microfabrication technology for applications in the emerging field of flexible electronics, with a particular focus on measuring bio-signals characterized by lower pressure ranges. Sensitivity, a critical parameter for effective FCPS performance, is investigated through a comprehensive series of simulation analyses employing finite element modeling. The study involves varying geometrical and mechanical parameters that influence FCPS performance, individually adjusting each parameter while keeping others constant. Microstructures such as cuboids, truncated pyramids with an aspect ratio of 0.5, cylinders, pyramids, and cones are modeled on the dielectric material surface. The parameters considered include inter-space, base length, height, and elastic modulus, to enhance FCPS sensitivity and linearity. Among the different shapes modeled, the cone exhibits the highest sensitivity, followed by the pyramid structure. Comparative analysis indicates that the cone and pyramid shapes demonstrate 15- and 10-times higher sensitivity, respectively, compared to the cuboid structure under an applied pressure of 10 Pa. Simulation results suggest that sensitivity can be finely tuned, with higher inter-space and microstructure height, as well as lower base length and Young’s modulus of the dielectric material, contributing to increased sensitivity. However, it is noted that these conditions may lead to decreased capacitance in the absence of applied pressure due to air occupation relative to the dielectric material. The findings are further compared with existing literature, and the FCPS response analysis provides valuable insights for the future design of FCPS, particularly in the context of biomedical applications requiring precise low-pressure signal measurements. This research contributes to advancing the understanding of FCPS performance optimization and lays the groundwork for the development of sensors with enhanced sensitivity for bio-medical applications.

Design and performance simulation of a silica microdisk cavity optical pressure sensor

The opto-mechanical system of optical whispering-gallery mode (WGM) microcavities confines resonant photons in micro-scale resonators for a long time, which can strongly enhance the interaction between light and matter, making it an ideal platform for various sensors. To measure the slim optical pressure in the interaction between the laser and matter, a silica microdisk cavity sensor with metal film is designed in this paper. In this study, the finite element method was employed to investigate the opto-mechanical coupling mechanism in a microdisk cavity. From the aspects of optics and mechanics, the structural parameters of the sensor were optimized and the performance was simulated. The simulation results show that at 1550 nm, the sensor’s optical quality factor (Q) can reach ∼104, the free spectral range is ∼5.3nm, the sensing sensitivity is 5.32mPa/Hz1/2, and the optical force resolution is 6.61×10−12N, which is better than the thin-film interferometry and optical lever method.

Highly Sensitive Biomimetic Crack Pressure Sensor with Selective Frequency Response.

High-sensitivity sensors in practical applications face the issue of environmental noise interference, requiring additional noise reduction circuits or filtering algorithms to improve the signal-to-noise ratio (SNR). To address this issue, this study proposes a biomimetic crack pressure sensor with selective frequency response based on hydrogel dampers. The core of this research is to construct a biomimetic crack pressure sensor with selective frequency response using the high-pass filtering characteristics of gelatin-chitosan hydrogels. This design, inspired by the slit sensilla and stratum corneum structure of spider legs, delves into the material properties and principles of hydrogel dampers, exploring their application in biomimetic crack pressure sensors, including parameter selection, structural design, and performance optimization. By delving into the nuanced characteristics and working principles of hydrogel dampers, their integration in biomimetic crack pressure sensors is examined, focusing on aspects like parameter selection, structural engineering, and performance enhancement to selectively sieve out low-frequency noise and transmit target vibrational signals. Experimental results demonstrate that this innovative sensor, while suppressing low-frequency vibration signals, can selectively detect high-frequency signals with high sensitivity. At different vibration frequencies, the relative change in resistance exceeds 200%, and the sensor sensitivity is 7 × 104 kPa-1. Furthermore, this sensor was applied to human voice detection, and the corresponding results verified its frequency-selective performance evidently. This study not only proposes a new design for pressure sensors but also offers fresh insights into the application of biomimetic crack pressure sensors in intricate environments.

Optimizing Capacitive Pressure Sensor Geometry: A Design of Experiments Approach with a Computer-Generated Model.

This study presents a comprehensive investigation into the design and optimization of capacitive pressure sensors (CPSs) for their integration into capacitive touch buttons in electronic applications. Using the Finite Element Method (FEM), various geometries of dielectric layers were meticulously modeled and analyzed for their capacitive and sensitivity parameters. The flexible elastomer polydimethylsiloxane (PDMS) is used as a diaphragm, and polyvinylidene fluoride (PVDF) is a flexible material that acts as a dielectric medium. The Design of Experiment (DoE) techniques, aided by statistical analysis, were employed to identify the optimal geometric shapes of the CPS model. From the prediction using the DoE approach, it is observed that the cylindrical-shaped dielectric medium has better sensitivity. Using this optimal configuration, the CPS was further examined across a range of dielectric layer thicknesses to determine the capacitance, stored electrical energy, displacement, and stress levels at uniform pressures ranging from 0 to 200 kPa. Employing a 0.1 mm dielectric layer thickness yields heightened sensitivity and capacitance values, which is consistent with theoretical efforts. At a pressure of 200 kPa, the sensor achieves a maximum capacitance of 33.3 pF, with a total stored electric energy of 15.9 × 10-12 J and 0.468 pF/Pa of sensitivity for 0.1 dielectric thickness. These findings underscore the efficacy of the proposed CPS model for integration into capacitive touch buttons in electronic devices and e-skin applications, thereby offering promising advancements in sensor technology.

Capacitive PVC gel pressure sensors with various interlinked microstructural dielectric middle layers

Our sharp tactile sense is largely attributable to an undulating layer of microstructures between the epidermis and dermis, amplifying tactile signals. Taking inspiration from the biological template, we propose a design of flexible capacitive pressure sensors with various microstructural dielectric middle layers, fabricated using a casting-based approach. This is the first confirmed use of microstructural polyvinyl chloride (PVC) gel in dielectric layers and the first example of casting in the fabrication of capacitive sensors. Notably, on account of its flexibility, the sensor also addresses the problem of microstructure fracture and misalignment during sensor bending. These sensors can achieve a maximum sensitivity of 1.34 kPa−1 (under 10 kPa) with a fast response time (50 ms), good cyclic stability (> 1000 cycles), and a wide pressure sensing range (0 ∼ 290 kPa). When attached to a cup or balloon, this study reveals that these sensors can detect the weight and rigidity of the objects, demonstrating their potential in human-machine interaction, as well as in wearable applications.