Sensitivity enhanced flexible capacitive pressure sensor microstructure optimization for biomedical applications

Abstract

Abstract This paper explores the design and optimization of Flexible Capacitive Pressure Sensors (FCPS) using microfabrication technology for applications in the emerging field of flexible electronics, with a particular focus on measuring bio-signals characterized by lower pressure ranges. Sensitivity, a critical parameter for effective FCPS performance, is investigated through a comprehensive series of simulation analyses employing finite element modeling. The study involves varying geometrical and mechanical parameters that influence FCPS performance, individually adjusting each parameter while keeping others constant. Microstructures such as cuboids, truncated pyramids with an aspect ratio of 0.5, cylinders, pyramids, and cones are modeled on the dielectric material surface. The parameters considered include inter-space, base length, height, and elastic modulus, to enhance FCPS sensitivity and linearity. Among the different shapes modeled, the cone exhibits the highest sensitivity, followed by the pyramid structure. Comparative analysis indicates that the cone and pyramid shapes demonstrate 15- and 10-times higher sensitivity, respectively, compared to the cuboid structure under an applied pressure of 10 Pa. Simulation results suggest that sensitivity can be finely tuned, with higher inter-space and microstructure height, as well as lower base length and Young's modulus of the dielectric material, contributing to increased sensitivity. However, it is noted that these conditions may lead to decreased capacitance in the absence of applied pressure due to air occupation relative to the dielectric material. The findings are further compared with existing literature, and the FCPS response analysis provides valuable insights for the future design of FCPS, particularly in the context of biomedical applications requiring precise low-pressure signal measurements. This research contributes to advancing the understanding of FCPS performance optimization and lays the groundwork for the development of sensors with enhanced sensitivity for bio-medical applications.