Scaling of Si MOSFETs has proceeded based on scaling law reported by R. H. Dennard in 1974[1], and technologies scaled down to 5 nm node are currently incorporated in ICs in production. Meanwhile, according to an IEEE semiconductor roadmap[2], the 5-nm node device has a gate length of 18 nm, suggesting that scaling is reaching its limit.FETs using crystalline oxide semiconductor (OS), especially, c-axis-aligned crystalline (CAAC)-IGZO, are highly compatible with BEOL process of CMOS because OSFETs can be fabricated at 450°C or lower. Unlike bulk Si, OSFETs can adopt a trench-gate-self-aligned (TGSA) structure[3] enabling isolation from the substrate and accommodating chip bonding technologies. Crystalline oxide semiconductor process contributes to vertical integration required in the future technology.FETs using CAAC-IGZO is preferred to have a charge accumulation structure such as n-i(n-)-n junction (FIG. 1) in which its channel region, especially the region direct below the gate, has to be adjusted to have an i(n-)-type conductivity. Such a junction structure enables threshold voltage control and a reduction in leakage current of the FET. The leakage current of the CAAC-IGZO FET is extremely low, yA (10-24 A)/mm measured at the transistor level at 85°C, which is lower by 10 digits than that of a CMOS device[3].A variety of applications using crystalline OS have been studied, including AI accelerators, high-resolution displays, nonvolatile memories and combination with sensors. Among them, an AI accelerator using crystalline OS has attracted attention[4]. Using crystalline OS enables memory to be placed near compute units. It can also be driven with low current; accordingly, improvement in computational efficiency is expected.Crystalline oxide semiconductor process is a promising technology enabling both high integration and lower power consumption of ICs with CMOS devices. < Reference > [1] R. H. Dennard et al., “Design of Ion-Implanted MOSFET’s with Very Small Physical Dimensions,” IEEE Journal of Solid-State Circuits, vol 9, Issue 5, pp.256-268, 1974.[2] International Roadmap for Devices and Systems (IRDS™) 2020 Edition, 2020.[3] H. Kunitake et al., “A c -Axis-Aligned Crystalline In-Ga-Zn Oxide FET With a Gate Length of 21 nm Suitable for Memory Applications,” IEEE J-EDS, vol. 7, pp. 495-502, 2019. Yamazaki et al., “Crystalline IGZO ceramics (crystalline oxide semiconductor)–based devices for artificial intelligence,” Ceramic Engineering & Science, vol. 1, Issue 1, pp.6-20, 2019. [4] D. Saito et al., “IGZO-Based Compute Cell for Analog In-Memory Computing—DTCO Analysis to Enable Ultralow-Power AI at Edge,” IEEE Transactions on Electron Devices, vol. 67, Issue 11, pp.4616-4620, 2020.FIG. 1: Electron holography analysis result of sample using crystalline OS. Figure 1