Atomic Deposition Research Articles

On the correlation between the TiN thin film properties and the energy flux of neutral sputtered atoms in direct current magnetron discharge

In this study, the energy flux of sputtered atoms on a substrate was correlated to the properties of titanium nitride (TiN) films deposited using direct current magnetron sputtering (dcMS) under mixed Ar and N2 atmospheres. The neutral titanium sputtered atoms velocity distribution functions (AVDFs) were measured by tunable diode-laser induced fluorescence (TD-LIF), and the flux of particles and their energy were derived. Mass spectrometry was used to characterize the energy-resolved flux of the ions. It was found that the neutral sputtered atoms flux and deposition rate were in good agreement, indicating that the flux of the neutral titanium ground state represents the number of deposited atoms. Moreover, TiN films were deposited at different gas pressures and at various Ar/N2 gas mixtures close to the conditions where stoichiometric TiN was formed, without bias voltage and heating of the substrates. The energy flux of the sputtered neutral Ti into the substrate was calculated from TD-LIF measurements. At a relatively low magnetron discharge pressure of 0.4 Pa, we demonstrated that the energy of sputtered neutral Ti impinging on the substrate is higher than the energy flux of ionized particles corresponding mainly to Ar+. Thus, the influence of the energy flux of the sputtered atoms on the texture and microstructure of the films is revealed. The (200) texture was obtained at 0.4 Pa when the energy flux of the sputtered atoms was higher than the ion energy flux. At 1.3 Pa where the sputtered atoms energy flux is one order lower compared to 0.4 Pa the (111) texture was obtained. The high-energy flux of the ground state of Ti sputtered atoms seems to allow stress removal in the films.

Modelling multi-scale material growth and erosion under energetic atomic deposition

ABSTRACT We study crystalline surface evolution in extreme environments, where high-energy atoms impinge on a crystalline surface to cause sputtering, growth and surface roughening. For our model system, we study the evolution of the Ni(111) surface under Ni atom bombardment, using Molecular Dynamics (MD) simulation and a Sutton-Chen force field, where the uppermost surface layers are free to move, supported by thermostatically controlled layers above a rigid template. The MD statistics of sputtering and sticking are used to aid the development of a computationally efficient kinetic Monte Carlo (KMC) code. Comparisons between the simulation surface morphologies are used to tune the KMC growth rules so that the key statistical features of the MD structures are captured by the KMC model. This model is then employed to explore the predicted behaviour over length and times scales much larger than those accessible to MD. While the MD-KMC approach is well known, this application to the complex surface growth encountered in energetic atomic bombardment illuminates the complexities of relating atomistic events to morphological evolution. The work shows how simulation methodology can be extended to provide predictive capabilities, paving the way for design tools for engineering processes such as plasma deposition film growth.

Atomic modification of Mo(1 0 0) surface for corrosion resistance

Metallic molybdenum is an important industrial material, however, its applications are hindered by oxidation corrosion. Here, an atom deposition strategy is proposed to mitigate surface oxidation based on the understanding of initial surface corrosion mechanism. The N atom deposited Mo(100) surface is firstly investigated by using density functional theory (DFT) calculations. N atoms prefer to occupy the hollow sites of the Mo(100) surface and can reach high N coverage, which significantly modulates the surface electronic structure, resulting in the weakening of adsorption strength and changes of adsorption site for H2O molecules and O atoms on the modified surface, thus enhancing the corrosion resistance of the Mo(100) surface. Furthermore, the atom deposition strategy is extended to B and C atoms, these surfaces present similar or even better performance for reducing the interactions between adsorbates and the surfaces. The B and C atoms in the subsurface of Mo(100) could induce surface reconstruction. The thermodynamic and dynamic stabilities of B/C/N atom modified Mo(100) surface are shown to be stable even under high temperature (<1000 K), confirming previous experimental explanation. This study provides a new strategy to improve the corrosion resistance of Mo metal.

SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam

Electron-based surface activation of surfaces functionalized by remote plasma appears like a flexible and novel approach to atomic scale etching and deposition. Relative to plasma-based dry etching that uses ion bombardment of a substrate to achieve controlled material removal, electron beam-induced etching (EBIE) is expected to reduce surface damage, including atom displacement, surface roughness, and undesired material removal. One of the issues with EBIE is the limited number of chemical precursors that can be used to functionalize material surfaces. In this work, we demonstrate a new configuration that was designed to leverage flexible surface functionalization using a remote plasma source, and, by combining with electron beam bombardment to remove the chemically reacted surface layer through plasma-assisted electron beam-induced etching, achieve highly controlled etching. This article describes the experimental configuration used for this demonstration that consists of a remote plasma source and an electron flood gun for enabling electron beam-induced etching of SiO2 with Ar/CF4/O2 precursors. We evaluated the parametric dependence of SiO2 etching rate on processing parameters of the flood gun, including electron energy and emission current, and of the remote plasma source, including radiofrequency source power and flow rate of CF4/O2, respectively. Additionally, two prototypical processing cases were demonstrated by temporally combining or separating remote plasma treatment and electron beam irradiation. The results validate the performance of this approach for etching applications, including photomask repair and atomic layer etching of SiO2. Surface characterization results that provide mechanistic insights into these processes are also presented and discussed.

Contact of the intrinsic magnetic topological insulator Mn(Bi,Sb)2Te4 with a superconducting Pb film

Intrinsic magnetic topological insulators (MTIs), such as an ${\mathrm{MnBi}}_{2}{\mathrm{Te}}_{4}$ family, have proved to be an essential platform for the study of various quantum effects and can be used for a range of applications from information storage and dissipationless spin and charge transfer to quantum computers. The latter requires the creation of Majorana fermions, which are expected to emerge when a superconductor is contacted with an MTI surface. Therefore the study of the features arising at the interface between the MTI and the superconductor is of great interest. For this purpose in this paper, the gradual growth of the elemental superconductor (Pb) film on the surface of $\mathrm{Mn}{({\mathrm{Bi}}_{0.7}{\mathrm{Sb}}_{0.3})}_{2}{\mathrm{Te}}_{4}$, which has a Dirac point near the Fermi level, was experimentally investigated by ARPES and XPS methods. We observed that the shape of the Dirac cone state remains almost unchanged up to coverage of $\ensuremath{\sim}1.5$ Pb monolayers, thus remaining topological properties of the material. It was shown that Pb atoms deposition results in surface modification. They detached upper Te atoms and form TePb alloy on the surface. Moreover, Pb deposition leads to disorder of Te, Bi(Sb) layers closest to the surface. As a result, the localization of the Dirac cone state shifts towards the bulk. All these features should be taken into account in the implementation of a topological superconducting state based on the Pb/Mn(Bi,${\mathrm{Sb})}_{2}{\mathrm{Te}}_{4}$ systems.

Flexible Amorphous Indium-Gallium-Zinc Oxide Thin-Film Transistor with Aluminum Oxide Gate Insulator on Polyimide Substrate By Spray Pyrolysis for Foldable Display

Research interest in thin-film transistor (TFT)-based flexible electronics for next-generation foldable and rollable displays is increasing, centering on flexible plastic substrates such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polyimide (PI). For flexible electronics using plastic substrates, it is important to select suitable semiconductor materials that can be deposited at low substrate temperature. Metal oxide (MO) semiconductors such as indium-gallium-zinc oxide (IGZO), zinc oxide (ZnO) are attracting attention as suitable candidates for plastic substrate electronics because of their higher mobility and optical transmittance than hydrogenated amorphous silicon (a-Si:H). In addition, since it can be processed at a lower temperature than low-temperature polysilicon (LTPS), it can be easily applied to flexible plastic substrates. One of the greatest advantages of MO is that it can be easily fabricated by conventional semiconductor processing methods such as sputtering, atomic laser deposition, and solution processes. Among them, solution-processed deposition method is particularly advantageous in terms of manufacturing efficiency because it does not require a separate vacuum system, and can efficiently utilize raw materials, so the fabrication cost is inexpensive. In particular, spray pyrolysis can guarantee environmental stability, high mobility, and large area production than other solution processes. In this work, we developed the high-performance, flexible a-IGZO/Al2O3 TFTs using spray pyrolysis fabricated on the flexible PI substrate. In a previous study, we developed a method to reduce curling and electrostatic discharge (ESD) damage to PI substrates by using a mixture of carbon nanotubes (CNTs) and graphene oxide (GO) between carrier glass and PI substrate. Therefore, it was possible to mechanically detach the TFTs on PI substrate and handle them easily even after detachment. The spray-pyrolyzed Al2O3 film is one of the high-k dielectric materials, which can lower the operating voltage, so the low-power consumption of the TFT backplane can be realized. The flexible spray-pyrolyzed a-IGZO/Al2O3 TFT exhibits the field-effect mobility (µFE) of 9.75 cm2 V−1 s−1, threshold voltage (VTH) of −0.8 V, subthreshold swing (SS) of 0.29 V dec−1, and on/off current ratio of 6.2 × 107. Even without TFT passivation layer, it shows environmental stability. The TFTs show robust electrical performance even under tensile strain with a bending radius of 1 mm. In addition, it showed stable electrical characteristics even in the repeated bending test of 30,000 cycles under compressive strain with a bending radius of 1 mm. This is due to fewer defects resulting from the smooth interface of the a-IGZO film and the Al2O3 film deposited through spray pyrolysis. Therefore, spray-pyrolyzed a-IGZO/Al2O3 TFT fabricated on PI substrate is a promising candidate for next-generation foldable display application. Figure 1

Effect of atomic layer deposited zinc promoter on the activity of copper-on-zirconia catalysts in the hydrogenation of carbon dioxide to methanol

The development of active catalysts for carbon dioxide (CO2) hydrogenation to methanol is intimately related to the creation of effective metal-oxide interfaces. In this work, we investigated how the order of addition of copper and zinc on zirconia influences the catalytic properties, the catalytic activity and selectivity toward methanol. Regarding the carbon dioxide conversion and methanol production, the catalysts on which the promoter (zinc) was atomically deposited after copper impregnation (i.e., ZnO/Cu/ZrO2 and ZnO/Cu/ZnO/ZrO2) were superior catalysts compared to the reverse copper-after-zinc catalyst (Cu/ZnO/ZrO2). Temperature-programmed experiments and in situ diffuse reflectance infrared Fourier transform-spectroscopy (DRIFTS) experiments allowed us to elucidate the benefits of the zinc-after-copper pair to store CO2 as carbonate species and further convert them into formate species, key intermediates in the formation of methanol. This research provides insights into the potential of atomic layer deposition in the development of tailored heterogeneous catalysts for efficient CO2 valorization to methanol.

Superatom Generation and Deposition of Alkali-like Ta@Si16 and Halogen-like Al13 via Atomic Aggregation

Surface modification with uniform nanostructures is a promising way to fabricate functionalized surface, and the synthetic electrode functionalization can be performed by depositing atomically precise nanoclusters with a specific number of atoms and compositions. During atomic nucleation and growth in gas phase, atomic aggregates exhibit novel electronic properties, mimicking atoms at a specific number of atoms and composition, which is called superatom (SA). Tantalum-encapsulating Si16 cage nanoclusters (Ta@Si16) and aluminum 13-mer (Al13) are promising SAs for designing their assembled materials with tunable properties, where one-electron-excessive Ta@Si16 and one-electron-deficient Al13 exhibit alkali- and halogen-like characteristics, respectively, owing to the electron shell closing. In this study, with an intense nanocluster ion source, Ta@Si16 + and Al13 − were generated during the formation of TaSi n + cations and Al n − anions, where Ta@Si16 + was remarkably generated compared with the neighboring species. SA deposition provided uniformly decorated surfaces exhibiting nanofunctional properties superior to those obtained by conventional atom deposition. With mass spectrometry, Ta@Si16 + and Al13 − SAs were size-selectively soft-landed on the substrate surfaces predeposited with n-type fullerene (C60) and p-type hexa-tert-butyl-hexa-peri-hexabenzocoronene (HB-HBC, C66H66). The electronic states of Ta@Si16 and Al13 SAs immobilized on the organic substrates were characterized by X-ray photoelectron spectroscopy and oxidative reactivities under O2 exposure.

On the Classical Solutions for the Kuramoto-Sivashinsky Equation with Ehrilch-Schwoebel Effects

The Kuramoto-Sivashinsky equation with Ehrilch-Schwoebel effects models the evolution of surface morphology during Molecular Beam Epitaxy growth, provoked by an interplay between deposition of atoms onto the surface and the relaxation of the surface profile through surface diffusion. It consists of a nonlinear fourth order partial differential equation. Using energy methods we prove the well-posedness (i.e., existence, uniqueness and stability with respect to the initial data) of the classical solutions for the Cauchy problem, associated with this equation.

Improvement of plasma carbonitriding modified layer on TA15 surface by RASP-assisted DGPSA treatment

In this paper, a dual process combining rotationally accelerated shot peening (RASP) and double glow plasma surface alloying (DGPSA) was designed to prepare Ti(C,N) modified-layer on titanium alloys. The improvement effect of RASP pretreatment on DGPSA technology was analyzed by comparing the surface phase composition, wear resistance and fractography of plasma-carbonitriding (PCN) layers with and without RASP pretreatment. It was found that RASP pretreatment promoted the diffusion and deposition of carbon and nitrogen atoms on the surface of titanium alloy, forming a thick and dense modified layer with a gradient variation in hardness. There is a large residual compressive stress on the surface of the modified layer after RASP-assisted DGPSA treatment. The near-surface fracture morphology indicates that RASP pretreatment can alleviate the adverse effects of surface brittleness and severe grain coarsening caused by heat treatment and improve the surface mechanical properties. The gradient reinforced layer formed by the dual treatment on the subsurface effectively supports the dense compound layer on the surface, resulting in excellent wear resistance.

Bioinspired gelatin nano-film implanted into composite scaffold exhibiting both expandable adhesion and enhanced proliferation

Tissue engineering technology provides a new treatment to the cartilage damage. Recent progress has focused on coating strategies with the printed scaffold surface, using various materials such as bioactive nanocomposites. However, the fracture and exfoliation of printed scaffolds remain challenges due to their poor adhesion on smooth substrates. These limitations can be offset by developing a versatile film. Here, inspired by the mechanism of the wet adhesion of snails, we introduced a biomimetic nanoscale gelatin film between a smooth conductive slide and a scaffold, which enhanced early cell adhesion rates through water absorption, swelling and adhesion. A bionic technique of preparing gelatin nanofilms and PVP/PCL 3D scaffolds, which involved E-Jet atomization deposition and E-Jet printing techniques based on the electrohydrodynamic effect, was investigated. It is found that the composite scaffold with 400 nm gelatin nanofilm significantly enhances cell attachment (from 62 % to 87 %) and proliferation (increased 6.5 times in 7 days). Collectively, this study highlights the combination of biomimetic nanoscale adhesive film in promoting cell adhesion and cartilage differentiation, which benefiting from water absorption and swelling of gelatin nanofilm. This work provides a new idea for the potential application in the orthopedics field.

Development of a scanning tunneling microscope for variable temperature electron spin resonance.

Recent advances in improving the spectroscopic energy resolution in scanning tunneling microscopy (STM) have been achieved by integrating electron spin resonance (ESR) with STM. Here, we demonstrate the design and performance of a homebuilt STM capable of ESR at temperatures ranging from 1 to 10K. The STM is incorporated with a homebuilt Joule-Thomson refrigerator and a two-axis vector magnet. Our STM design allows for the deposition of atoms and molecules directly into the cold STM, eliminating the need to extract the sample for deposition. In addition, we adopt two methods to apply radio-frequency (RF) voltages to the tunnel junction: the early design of wiring to the STM tip directly and a more recent idea to use an RF antenna. Direct comparisons of ESR results measured using the two methods and simulations of electric field distribution around the tunnel junction show that, despite their different designs and capacitive coupling to the tunnel junction, there is no discernible difference in the driving and detection of ESR. Furthermore, at a magnetic field of ∼1.6T, we observe ESR signals (near 40GHz) sustained up to 10K, which is the highest temperature for ESR-STM measurement reported to date, to the best of our knowledge. Although the ESR intensity exponentially decreases with increasing temperature, our ESR-STM system with low noise at the tunnel junction allows us to measure weak ESR signals with intensities of a few fA. Our new design of an ESR-STM system, which is operational in a large frequency and temperature range, can broaden the use of ESR spectroscopy in STM and enable the simple modification of existing STM systems, which will hopefully accelerate a generalized use of ESR-STM.

Modification of ZIF-8 membranes by atomic layer deposition for high propylene/propane selectivity

Zeolitic-imidazolate framework (ZIF-8) membranes have great potential to separate propylene/propane gas mixtures. Our recent work demonstrated that an excellent propylene/propane separation factor is obtained with a silicalite-seeded ZIF-8 membrane. However, the separation performance was limited due to non-selective defects in the ZIF-8 membranes that adversely affected the membrane separation performance. To further improve membrane performance, zinc oxide (ZnO) was atomically deposited on the synthesized ZIF-8 membrane surface using atomic layer deposition (ALD). ZnO ALD helped to minimize surface defects and inter-crystalline gaps of the membrane and improved the propylene/propane separation factor while maintaining the propylene permanence. After ZnO ALD treatment, ZIF-8 membranes showed significant improvement of the propylene/propane separation factor from 141 to 264, but at the expense of the propylene permeance with a ∼10% reduction. The improvement is likely due to defects healing on the ZIF-8 membrane surface via ZnO ALD. The resulting ZIF-8 membranes were characterized by XRD, XPS, BET, and SEM.

Atom deposition and sputtering at normal incidence simulated by the Frenkel-Kontorova chain.

The impact of a molecule of N atoms with a speed of v_{0} on the free end of the Frenkel-Kontorova chain is numerically simulated. Depending on the values of N and v_{0}, different scenarios of the molecule-chain interaction are observed. Molecules with low speed stick to the chain. At somewhat higher speeds, the molecules bounce off the chain. Further increase in v_{0} results in bouncing off a molecule larger than the incident one. At even higher speed, bouncing of the molecule off the chain takes place simultaneously with the formation of a supersonic crowdion (antikink) propagating along the chain. A very high collision velocity leads to the sputtering of atoms from the chain and the formation of single and multiple supersonic crowdions. Interestingly, the sputtering yield Y as the function of v_{0} demonstrates a nonmonotonous dependence. This is explained by the fact that supersonic crowdions can have a discrete set of propagation velocities. When v_{0} is such that supersonic crowdions are effectively excited, the latter transfer energy deep into the chain, and the sputtering is minimal. For some v_{0} ranges, the formation of supersonic crowdions is suppressed. In these cases, the energy transferred from the impact of the molecule to the chain is spent mainly on the sputtering of atoms. The results obtained qualitatively explain the physics of bombardment of a crystal surface by atomic clusters with applications in physical vapor deposition, ion implantation, ion-beam sputtering, and similar experimental techniques.

Nesting of multiple polyhedral plasmonic nanoframes into a single entity

The development of plasmonic nanostructures with intricate nanoframe morphologies has attracted considerable interest for improving catalytic and optical properties. However, arranging multiple nanoframes in one nanostructure especially, in a solution phase remains a great challenge. Herein, we show complex nanoparticles by embedding various shapes of three-dimensional polyhedral nanoframes within a single entity through rationally designed synthetic pathways. This synthetic strategy is based on the selective deposition of platinum atoms on high surface energy facets and subsequent growth into solid platonic nanoparticles, followed by the etching of inner Au domains, leaving complex nanoframes. Our synthetic routes are rationally designed and executable on-demand with a high structural controllability. Diverse Au solid nanostructures (octahedra, truncated octahedra, cuboctahedra, and cubes) evolved into complex multi-layered nanoframes with different numbers/shapes/sizes of internal nanoframes. After coating the surface of the nanoframes with plasmonically active metal (like Ag), the materials exhibited highly enhanced electromagnetic near-field focusing embedded within the internal complicated rim architecture.

Atomistic growth model with edge diffusion for chiral carbon nanotubes

We carried out exact finite-size analysis and numerical simulation within a kinetic 5-vertex model to study the growth dynamics of chiral carbon nanotubes. The model comprises carbon atoms deposition and migration at the nanotube edge considered as Markov processes and a generalized Glauber dynamics is assumed. The physical parameters considered are the supersaturation of the carbon fluid phase, the synthesis temperature and the nanotube chirality which is known to be fixed by the nucleated cap. In the model, we are interested by the elongation of the nucleus in a tube. We calculated the growth rate and edge defect densities . The growth modes of the tube have been singled out in the model parameters’ space. It has been found that spiral growth by pre-existing steps displacements is present beyond 1D-nucleation and continuous growth. In particular we obtained that in suitable physical conditions, the growth rate increases proportionally with the chiral angle θ of the nanotube up to a critical value θ c which depends on values of model parameters. • Mapping of a chiral SWCNT growth onto a kinetic 5-vertex model. • Deposition and diffusion of carbon atoms at the SWCNT edge are considered. • Exact calculations and Monte Carlo simulation methods are used. • Growth rates and defects densities are calculated and growth modes of the CNT edge specified. • The elongation rate and the SWCNT chirality are linearly correlated in some model parameters ranges.

Artificial Antiferromagnets Possessing Extended Zero-, One-, Two-, and Three-Dimensional Structures.

Layered (2D) artificial (or synthetic) antiferromagnets are fabricated by atom deposition techniques and possess very thin, nanometer-scale, magnetically ordered layers separated by a very thin nonmagnetic layer that antiferromagnetically couples the magnetic layers. Artificial antiferromagnets were crucial in the discovery of the giant magnetic effect (GMR), which had an incredible impact on the evolution of computer memory and its applications, and nucleated the dawn of spintronics (magnetoelectrics). The fundamental structural motif has been more recently achieved by using synthetic chemical methods that led to insulating artificial antiferromagnets. Examples of magnetically ordered layers that are antiferromagnetic coupled to form artificial antiferromagnets have been extended to isolated ions (0D) as well as extended chain (1D) and extended network 3D structures, and new phenomena and applications are anticipated as insulating antiferromagnets are more effective at propagating spin currents with respect to dielectric materials.

The Effect of Reactive Sputtering on the Microstructure of Parylene-C.

Sputtering technique involves the use of plasma that locally heats surfaces of substrates during the deposition of atoms or molecules. This modifies the microstructure by increasing crystallinity and the adhesive properties of the substrate. In this study, the effect of sputtering on the microstructure of parylene-C was investigated in an aluminum nitride (AlN)-rich plasma environment. The sputtering process was carried out for 30, 45, 90 and 120 min on a 5 μm thick parylene-C film. Topography and morphology analyses were conducted on the parylene-C/AlN bilayers. Based on the experimental data, the results showed that the crystallinity of parylene-C/AlN bilayers was increased after 30 min of sputtering and remained saturated for 120 min. A scratch-resistance test conducted on the bilayers depicted that a higher force is required to delaminate the bilayers on top of the substrate. Thus, the adhesion properties of parylene-C/AlN bilayers were improved on glass substrate by about 17% during the variation of sputtering time.

Fabrication of Gold-Based "Sphere-on-Plate" Hybrid Nanostructures with Dual Plasmonic Absorptions Covering Visible and Near-Infrared II Windows via the Volmer-Weber Growth Mode.

We report a synthetic strategy to create gold(Au)-based "sphere-on-plate" hybrid nanostructures (SPHNSs). The surface doping of plate-like Au seeds with Pt/Ag atoms is found to be crucial to increase the lattice spacing, inducing island-like deposition of Au atoms via the Volmer-Weber growth mode. The resulting products are featured with the morphology that quasi-spherical nanoparticles are scattered over the nanoplates. Due to the presence of two distinctly dimensioned particles in one entity, the current Au-based SPHNSs exhibit unique dual plasmonic absorptions, where the visible absorbance centered at 546 nm is related to the size of the anchored particles. Arising from such a plasmonic advantage, the Au-based SPHNSs exhibit enhancement in photothermal conversion under laser irradiations at the wavelengths of both 808 and 1064 nm. The current work offers a feasible route to fabricate noble metal hybrid nanostructures involving zero-dimensional (0D) and two-dimensional (2D) structures, which could work as promising materials for photothermal conversion.

Molecular Dynamics Simulation and Mechanical Properties Analysis of Ni-Fe Alloy under Uniaxial Stretching

Based on Molecular Dynamics (MD), construct a crystallization model of Ni-Fe alloy and an amorphous model by simulating atomic deposition, stretch the models with the X axis and got the stress-strain curve. It is clearly observed that the maximum strain of the crystallization model is 0.25, and the maximum bearing stress is 450 MPa, it is fits perfectly with the objective reality data; the maximum strain of the amorphous model is about 0.3, and the maximum stress is 480 MPa, its ductility significantly higher than the crystallization model. In addition, by changing the temperature, it can be found easily that the maximum stress of the model is decreasing and the maximum strain is increasing. This indicates that under the influence of temperature, the hardness of the Ni-Fe alloy will decrease by 14%, while the ductility and toughness will increase by 7.7% with a temperature change of 150 K.