This article presents a low-power, high-gain, high-linearity phased-array transmit (Tx) beamformer chip in a 45-nm RFSOI process. An architecture employing a power amplifier with neutralization, a 180° active phase shifter and 11/22/45/90° passive phase shifter result in high linearity and low power consumption. The measured gain is 22 dB with a 3-dB bandwidth of 57.5–65.5 GHz and an ${\mathrm{ OP}}_{1\,{\mathrm{ dB}}}$ and ${\mathrm{ OP}}_{\mathrm{ sat}}$ of 7.5–10 dBm and 9.5–11.5 dBm at 57–64 GHz, respectively. A peak power-added efficiency (PAE) of 14.6% and 17.6% at 60 GHz is achieved at $P_{1\,{\mathrm{ dB}}}$ and $P_{\mathrm{ sat}}$ , respectively. The measured rms phase and gain errors are $ and ${\mathrm{ OP}}_{1\,{\mathrm{ dB}}}$ . Complex modulation measurements using a 400 MBaud 64-QAM waveform show an error vector magnitude (EVM) of 5% (−26 dB) at an average power of 5 dBm and with a dc power consumption of only 52 mW, resulting in a linear PAE of 6.1%. Also, 18–20 Gbps data rates are demonstrated with an EVM < 5% (64-QAM) and < 9% (16-QAM) at 60 GHz. To the author’s knowledge, this work achieves state-of-the-art linearity and efficiency for 60-GHz communication systems.