Undoped cylindrical gate all around (GAA) MOSFET is a radical invention and a potential candidate to replace conventional MOSFET, as it introduces new direction for transistor scaling. In this work, the sensitivity of process parameters like channel length ( L g), channel thickness ( t Si ), and gate work function ( φ M ) on various performance metrics of an undoped cylindrical GAA to nanowire MOSFET are systematically analyzed. The electrical characteristics such as on current ( I on ), subthreshold leakage current ( I off ), threshold voltage ( V th ) and similarly analog/RF performances like transconductance ( g m ), total gate capacitance ( C gg ), and cut-off frequency ( f T ) are evaluated and studied with the variation of device design parameters. The discussion give direction towards low standby operating power (LSTP) devices as improvement in I off is approaching 90% in nanowire MOSFET. All the device performances of undoped GAA MOSFET are investigated through Sentaurus device simulator from Synopsis Inc.
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