Abstract
An analytical model of CGAA MOSFET incorporating material engineering, channel engineering and stack engineering has been proposed and verified using ATLAS 3D device simulator. A comparative study of short channel effects for various device structures has also been carried out incorporating the effect of drain induced barrier lowering (DIBL), threshold voltage lowering and degradation of subthreshold slope. The effectiveness of applying the three region doping profile concept in the channel such as high-medium-low and low-high-low and its comparison with Gaussian doping profile to the cylindrical GAA MOSFET has been examined in detail. Reduced SCEs have been evaluated in combined designs i.e. TM–GC–GS, GCGS and DM–GC–GS. Out of several design engineering, GC–GS CGAA gives nearly ideal subthreshold slope whereas TM–GC–GS CGAA provides overall superior performance to reduce SCEs in deep nano-meter. The results so obtained are in good agreement with the simulated data which validate the model.
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