Cross-sectional Transmission Electron Microscopy Analysis Research Articles

Study on the fabrication of high-quality hafnium oxide thin films using spatial rotated atomic layer deposition and supercritical fluids treatment

This study explores the experimental outcomes and discussions surrounding the deposition of high-quality hafnium oxide (HfO2) thin films using spatial rotated atomic layer deposition (SRALD). The primary objective was to enhance the efficiency of ALD processes while maintaining film quality comparable to conventional methods. The SRALD system, developed by Kudos Nano Technology, was employed to deposit HfO2 films over a four-step process. Following deposition, the films underwent high-pressure annealing and supercritical fluids treatment, which are known for reducing thermal budgets. The key findings revealed that high-pressure annealing resulted in a significant reduction in the leakage current by up to 50%, while supercritical fluids treatment improved the dielectric constant of the films, reaching values as high as 23. These treatments also contributed to enhancing the uniformity and density of the films, as confirmed by cross-sectional transmission electron microscopy and x-ray reflectometry analyses. The electrical properties of the resulting metal–insulator–semiconductor capacitors were thoroughly investigated, demonstrating a marked improvement in capacitance-voltage characteristics with minimal hysteresis.

Elucidating a proper framework for the determination of threading dislocation densities in semiconductor films: a comprehensive study based on Ge/Si(001)

Abstract Methods of deducing threading dislocation densities (TDDs) from x-ray diffraction (XRD) peak widths have been reevaluated based on crystallography theories. Moreover, Ge/Si heteroepitaxial structures were taken as model materials for investigation. The procedure is tailored in accordance with the specific designs of modern XRD systems to minimize instrumental interference, whereas practical characteristics of heteroepitaxial films are also considered to avoid intrinsic errors. TDDs of samples grown with different epitaxy methods were investigated using the newly implemented XRD method and etch pit density (EPD) method, and satisfactory agreement has been achieved among three independently calculated sets of TDD results: two from XRD and one from EPD. These values were further corroborated by cross-sectional transmission electron microscopy analysis. Key considerations that are of scientific and technical importance in TDD studies are also discussed in detail. The present work provides not only the most up-to-date elucidation on obtaining TDD values in semiconductor epitaxial films, but also insights into the long-existing ambiguity in TDD calculation methods, which will be helpful for the future studies of defect density characterizations in various material systems.

Effect of Zr addition on the corrosion resistance of Ti-Mo alloy in the H2O2-containing inflammatory environment

Reactive oxygen species (ROS), produced by immune cells during inflammatory reaction, are known to promote corrosion of standard biomedical materials such as CP-Ti and Ti-6Al-4V. Electrochemical corrosion in the ROS environment can be further accelerated in the vicinity of fretting regions, where titanium can be polarized towards negative potentials. This study considers both of these aspects and presents corrosion analysis under complex inflammatory conditions for Ti-Mo and Ti-Mo-Zr alloys, which offer exceptional strain-hardening behavior and ductility. Combining electrochemical impedance spectroscopy (EIS) and atomic emission spectroelectrochemistry (AESEC) allowed us to understand the origin of ROS-induced corrosion. At free corrosion conditions, Zr was found to suppress oxide layer growth without any significant effect on the dissolution process. On the other hand, Zr suppressed dissolution rate under cathodic potentials. Although applying cathodic potential resulted in a rapid increase of dissolution rate, cross-section transmission electron microscopy (TEM) analysis did not reveal significant influence of the short cathodic polarization on the oxide film growth during further prolonged exposure at free corrosion conditions.

Continuous Template Growth of Large-Scale Tellurene Films on 1T'-MoTe2.

Use of a template triggers an epitaxial interaction with the depositing material during synthesis. Recent studies have demonstrated that two-dimensional tellurium (tellurene) can be directionally oriented when grown on transition metal dichalcogenide (TMD) templates. Specifically, employing a T-phase TMD, such as WTe2, restricts the growth direction even further due to its anisotropic nature, which allows for the synthesis of well-oriented tellurene films. Despite this, producing large-area epitaxial films still remains a significant challenge. Here, we report the continuous synthesis of a 1T'-MoTe2 template via chemical vapor deposition and tellurene via vapor transport. The interaction between helical Te and the 1T'-MoTe2 template facilitates the Te chains to collapse into ribbon shapes, enhancing lateral growth at a rate approximately 6 times higher than in the vertical direction, as confirmed by scanning electron microscopy and atomic force microscopy. Interestingly, despite the predominance of the lateral growth, cross-sectional transmission electron microscopy analysis of the tellurene ribbons revealed a consistent 60-degree incline at the edges. This suggests that the edges of the tellurene ribbons, where they contact the template surface, are favorable sites for additional Te absorption, which then stacks along the incline angle to expand. Furthermore, controlling the synthesis temperature, duration, and preheating time has facilitated the successful synthesis of tellurene films. The resultant tellurene exhibited hole mobility as high as ∼400 cm2/V s. After removing the underlying metallic template with plasma treatment, the film showed a current on/off ratio of ∼103. This ratio was confirmed by two-terminal field-effect transistor measurements and supported by near-field terahertz (THz) spectroscopy mapping.

GeSn-on-GaAs with photoconductive carrier lifetime >400 ns: role of substrate orientation and atomistic simulation.

Group IV GeSn quantum material finds application in electronics and silicon-compatible photonics. Synthesizing these materials with low defect density and high carrier lifetime is a potential challenge due to lattice mismatch induced defects and tin segregation at higher growth temperature. Recent advancements in the growth of these GeSn materials on Si, Ge, GaAs, and with substrate orientations, demonstrated different properties using epitaxial and chemical deposition methods. This article addresses the effect of GaAs substrate orientation and misorientation on the materials' properties and carrier lifetimes in epitaxial Ge0.94Sn0.06 layers. With starting GaAs substrates of (100)/2°, (100)/6°, (110) and (111)A orientations, Ge0.94Sn0.06 epitaxial layers were grown with an intermediate Ge buffer layer by molecular beam epitaxy and analyzed by several analytical tools. X-ray analysis displayed good crystalline quality, and Raman spectroscopy measurements showed blue shifts in phonon wavenumber due to biaxial compressive strain in Ge0.94Sn0.06 epilayers. Cross-sectional transmission electron microscopy analysis confirmed the defect-free heterointerface of Ge0.94Sn0.06/Ge/GaAs heterostructure. Minority carrier lifetimes of the unintentionally doped n-type Ge0.94Sn0.06 epilayers displayed photoconductive carrier lifetimes of >400 ns on (100)/6°, 319 ns on (100)/2°, and 434 ns on (110) GaAs substrate at 1500 nm excitation wavelength. On the other hand, Ge0.94Sn0.06 layer showed poor carrier lifetime on (111)A GaAs substrate. The observed differences in carrier lifetimes were correlated with the formation energy of the Ge on (100)/6° and (100)/2° GaAs heterointerface using Stillinger-Weber interatomic potential model-based atomistic simulation with different heterointerfacial bonding by Synopsys QuantumATK tool. Total energy computation of 6280-atom Ge/GaAs supercell on (100)/6° leads to lower formation energy than (100)/2°, making it more thermodynamically stable. Hence, the growth of the GeSn/III-V material system using misoriented (100) substrates that are more thermodynamically stable will enhance the performances of optoelectronic devices.

2D Hybrid Perovskites Employing an Organic Cation Paired with a Neutral Molecule.

Two-dimensional (2D) hybrid perovskites harness the chemical and structural versatility of organic compounds. Here, we explore 2D perovskites that incorporate both a first organic component, a primary ammonium cation, and a second neutral organic module. Through the experimental examination of 42 organic pairs with a range of functional groups and organic backbones, we identify five crystallization scenarios that occur upon mixing. Only one leads to the cointercalation of the organic modules with distinct and extended interlayer spacing, which is observed with the aid of X-ray diffraction (XRD) pattern analysis combined with cross-sectional transmission electron microscopy (TEM) and elemental analysis. We present a picture in which complementary pairs, capable of forming intermolecular bonds, cocrystallize with multiple structural arrangements. These arrangements are a function of the ratio of organic content, annealing temperature, and substrate surface characteristics. We highlight how noncovalent bonds, particularly hydrogen and halogen bonding, enable the influence over the organic sublattice in hybrid halide perovskites.

Corrosion behavior and microstructure of the surface corrosion film of biodegradable WE43 and ZX21 Mg alloys in Hanks’ balanced salt solution

In this study, the corrosion behavior and microstructure of the surface corrosion film of WE43 (Mg-4 wt%Y-3 wt%RE) and ZX21 (Mg-2 wt%Zn-1 wt%Ca) Mg alloys immersed in Hanks’ balanced salt solution (HBSS) at 37 °C are investigated. Through cross-sectional transmission electron microscopy (TEM) analysis, the surface corrosion films formed on both alloys after immersion in HBSS for 24 h are mainly a mixture of magnesium hydroxide (Mg(OH)2) and dicalcium phosphate dihydrate (DCPD) (CaHPO4·2H2O). Nevertheless, the surface corrosion film on WE43 alloy is only 114 ± 17 nm with Ca and P enriched in the outer portion of the film, while the surface corrosion film on ZX21 alloy is thicker (406 ± 50 nm) with some scattered hollow corrosion products on top of the film. The difference in the surface corrosion film thickness and microstructure is because of the faster corrosion rate of the ZX21 alloy, which resulted from the occurrence of localized corrosion on the alloy surface.

Laser induced diamond/graphite structure for all-carbon deep-ultraviolet photodetector

Graphite was formed by in-situ structural conversion from sp3 to sp2 hybridized carbon via KrF excimer. The surface morphology of diamond was changed to nanoparticles after laser irradiation. Raman peak related to amorphous carbon emerged after laser treatments with energy of 10 ∼ 25 mJ cm−2. X-ray photoelectron spectroscopy exhibited that surface graphitization could take place under low laser energy of 2 mJ cm−2. The structural transformation of diamond after laser irradiation was further studied by cross-sectional transmission electron microscopy (TEM) analysis. The TEM results displayed that the diamond/graphite interface was gradually transformed from diamond to graphite, and the transformation process was verified by molecular dynamics simulations. The specific contact resistance of 7.83 × 10-5 Ω cm2 for the diamond/graphite structure was acquired by transmission line model. Meanwhile, the barrier height of the graphite/diamond contact was obtained to be 0.54 eV. In the end, an all-carbon deep-ultraviolet photodetector with diamond/graphite structure was developed. The all-carbon photodetector exhibited relatively high responsivity of 15 mA/W under 220 nm illumination, and a fast transient response of 86 μs.

Fabrication of sub-5 nm uniform zirconium oxide films on corrugated copper substrates by a scalable polymer brush assisted deposition method

We demonstrate a polymer brush assisted approach for the fabrication of continuous zirconium oxide (ZrO2) films over large areas with high uniformity (pin-hole free) on copper (Cu) substrates. This approach involves the use of a thiol-terminated polymethyl methacrylate brush (PMMA-SH) as the template layer for the selective infiltration of zirconium oxynitrate (ZrN2O7). The preparation of a highly uniform covalently grafted polymer monolayer on the Cu substrate is the critical factor in fabricating a metal oxide film of uniform thickness across the surface. Infiltration is reliant on the chemical interactions between the polymer functional group and the metal precursor. A following reductive H2 plasma treatment process results in ZrO2 film formation whilst the surface Cu2O passive oxide layer was reduced to a Cu/Cu2O interface. Fundamental analysis of the infiltration process and the resulting ZrO2 film was determined by XPS, and GA-FTIR. Results derived from these techniques confirm the inclusion of the ZrN2O7 into the polymer films. Cross-sectional transmission electron microscopy and energy dispersive X-ray mapping analysis corroborate the formation of ZrO2 layer at Cu substrate. We believe that this quick and facile methodology to prepare ZrO2 films is potentially scalable to other high-κ dielectric materials of high interest in microelectronic applications.

Implementation of high-performance and high-yield nanoscale hafnium zirconium oxide based ferroelectric tunnel junction devices on 300 mm wafer platform

In this work, hafnium zirconium oxide (HZO)-based 100 × 100 nm2 ferroelectric tunnel junction (FTJ) devices were implemented on a 300 mm wafer platform, using a baseline 65 nm CMOS process technology. FTJs consisting of TiN/HZO/TiN were integrated in between metal 1 (M1) and via 1 (V1) layers. Cross-sectional transmission electron microscopy and energy dispersive x-ray spectroscopy analysis confirmed the targeted thickness and composition of the FTJ film stack, while grazing incidence, in-plane x-ray diffraction analysis demonstrated the presence of orthorhombic phase Pca21 responsible for ferroelectric polarization observed in HZO films. Current measurement, as a function of voltage for both up- and down-polarization states, yielded a tunneling electroresistance (TER) ratio of 2.28. The device TER ratio and endurance behavior were further optimized by insertion of thin Al2O3 tunnel barrier layer between the bottom electrode (TiN) and ferroelectric switching layer (HZO) by tuning the band offset between HZO and TiN, facilitating on-state tunneling conduction and creating an additional barrier layer in off-state current conduction path. Investigation of current transport mechanism showed that the current in these FTJ devices is dominated by direct tunneling at low electric field (E < 0.4 MV/cm) and by Fowler–Nordheim (F–N) tunneling at high electric field (E > 0.4 MV/cm). The modified FTJ device stack (TiN/Al2O3/HZO/TiN) demonstrated an enhanced TER ratio of ∼5 (2.2× improvement) and endurance up to 106 switching cycles. Write voltage and pulse width dependent trade-off characteristics between TER ratio and maximum endurance cycles (Nc) were established that enabled optimal balance of FTJ switching metrics. The FTJ memory cells also showed multi-level-cell characteristics, i.e., 2 bits/cell storage capability. Based on full 300 mm wafer statistics, a switching yield of >80% was achieved for fabricated FTJ devices demonstrating robustness of fabrication and programming approach used for FTJ performance optimization. The realization of CMOS-compatible nanoscale FTJ devices on 300 mm wafer platform demonstrates the promising potential of high-volume large-scale industrial implementation of FTJ devices for various nonvolatile memory applications.

Fabrication and characterization of NbN/(TaN/NbN) N stacked Josephson junctions

In this work, we present a detailed study of the electrical properties of stacked NbN/(TaN/NbN) N Josephson junctions. Cross-sectional scanning transmission electron microscopy analysis of the 5-stacked junction shows that the multilayer interface is very flat, each barrier has the same thickness, and the sidewalls of the junctions are nearly perpendicular to the substrate. Stacked junctions of different sizes and stacking numbers all have only one transition in their current–voltage curves. This indicates that the critical currents of the junctions in the stacked junctions are almost the same, showing the stability and repeatability of the multilayer fabrication and etching process. At 4.2 K, the 4-stacked junction shows excellent Josephson properties with characteristic voltage V c of 3.54 mV, which is about four times the 0.88 mV of the single junction. The temperature dependence of critical current density J c and V c of the stacked junction with N = 1, 2, 4 were measured, all of which can be fitted with dirty-limit theory. Stacked junctions with larger V c or more stacked layers can be achieved by optimizing electrode and barrier thickness, barrier resistivity, and thermal relaxation rate, etc.

Failure analysis on silicon semiconductor device materials: optical and high-resolution microscopic assessments

Defects of silicon (Si) semiconductor epilayers are crucial to be identified at laboratory environs. The identification of failure and its rectification at laboratory settings is essential for large-scaling manufacturing of narrowed down semiconductor devices. This research documented the inspection, identification and the solution for defects found in the Si semiconductor epilayers, fabricated by a simple and conventional photolithography technique, with the integration of metal oxide nanomaterial, zinc oxide (ZnO). The semiconductor epilayers, Si wafer, Si oxide and ZnO coated SiO2 layer were formed and examined. Optical microscope images [high power microscope (HPM) and 3D profilometer] reveal smooth surface of semiconductor epilayers development through thermal oxidation and photolithography techniques. High power ultraviolet-visible (UV-Vis) justified the accuracy of wet thermal oxidation by examining the thickness of oxide layer on Si wafer at 3837.3 Å. The X-ray diffraction (XRD) analysis of sol-gel synthesized ZnO affirmed the hexagonal crystalline state and its nanoscale size at 54 nm. Field emission scanning electron microscopy (FESEM) has shown the insight of Si epilayer morphology with its elemental composition, which provides details of foreign substances on semiconductor surface. ZnO deposited Si epilayer was prepared through lamella preparation, prior to the cross-sectional field emission transmission electron microscopy (FETEM) analysis of the semiconductor, which revealed the uniformity of fabrication and ZnO distribution at Si epilayer. Failure analysis reported several defects on the Si epilayers in the state of patches and accumulation of impurities. The potential cause of the defects and the respective solutions are discussed as the accuracy and handling must be ensured throughout the fabrication process, to develop a flawless semiconductor for high performance applications.

Transmission Electron Microscopy Study on the Effect of Thermal and Electrical Stimuli on Ge2Te3 Based Memristor Devices

Memristor devices fabricated using the chalcogenide Ge2Te3 phase change thin films in a metal-insulator-metal structure are characterized using thermal and electrical stimuli in this study. Once the thermal and electrical stimuli are applied, cross-sectional transmission electron microscopy (TEM) and X-ray energy-dispersive spectroscopy (XEDS) analyses are performed to determine structural and compositional changes in the devices. Electrical measurements on these devices showed a need for increasing compliance current between cycles to initiate switching from low resistance state (LRS) to high resistance state (HRS). The measured resistance in HRS also exhibited a steady decrease with increase in the compliance current. High resolution TEM studies on devices in HRS showed the presence of residual crystalline phase at the top-electrode/dielectric interface, which may explain the observed dependence on compliance current. XEDS study revealed diffusion related processes at dielectric-electrode interface characterized, by the separation of Ge2Te3 into Ge- and Te- enriched interfacial layers. This was also accompanied by spikes in O level at these regions. Furthermore, in-situ heating experiments on as-grown thin films revealed a deleterious effect of Ti adhesive layer, wherein the in-diffusion of Ti leads to further degradation of the dielectric layer. This experimental physics-based study shows that the large HRS/LRS ratio below the current compliance limit of 1 mA and the ability to control the HRS and LRS by varying the compliance current are attractive for memristor and neuromorphic computing applications.

Line-shaped defects: Origin of leakage current in halide vapor-phase epitaxial (001) β -Ga2O3 Schottky barrier diodes

We observed line-shaped defects in halide vapor-phase epitaxial (001) β-Ga2O3 SBDs. Light emission patterns, representing the reverse leakage current, were observed at these line-shaped defects. In atomic force microscopy observations, the line-shaped defects appeared as grooves with a typical depth and width of 113 and 520 nm, respectively. Such defects corresponded to a leakage current of −0.23 μA at −200 V. Simulation results indicated that the electric field, with an intensity of 1.3 MV/cm, was highly concentrated at the bottom of the line defects. According to the cross-sectional scanning transmission electron microscopy analysis, the line-shaped defects were generated from a dislocation network beneath the crystal near the surface.

Identification of type of threading dislocation causing reverse leakage in GaN p\u2013n junctions after continuous forward current stress

Power devices are operated under harsh conditions, such as high currents and voltages, and so degradation of these devices is an important issue. Our group previously found significant increases in reverse leakage current after applying continuous forward current stress to GaN p–n junctions. In the present study, we identified the type of threading dislocations that provide pathways for this reverse leakage current. GaN p–n diodes were grown by metalorganic vapor phase epitaxy on freestanding GaN(0001) substrates with threading dislocation densities of approximately 3 × 105 cm−2. These diodes exhibited a breakdown voltage on the order of 200 V and avalanche capability. The leakage current in some diodes in response to a reverse bias was found to rapidly increase with continuous forward current injection, and leakage sites were identified by optical emission microscopy. Closed-core threading screw dislocations (TSDs) were found at five emission spots based on cross-sectional transmission electron microscopy analyses using two-beam diffraction conditions. The Burgers vectors of these dislocations were identified as [0001] using large-angle convergent-beam electron diffraction. Thus, TSDs for which b = 1c are believed to provide current leakage paths in response to forward current stress.

A van der Waals Integrated Damage-Free Memristor Based on Layered 2D Hexagonal Boron Nitride.

2D materials with intriguing properties have been widely used in optoelectronics. However, electronic devices suffered from structural damage due to the ultrathin materials and uncontrolled defects at interfaces upon metallization, which hindered the development of reliable devices. Here, a damage-free Au/h-BN/Au memristor is reported using a clean, water-assisted metal transfer approach by physically assembling Au electrodes onto the layered h-BN which minimized the structural damage and undesired interfacial defects. The memristors demonstrate significantly improved performance with the coexistence of nonpolar and threshold switching as well as tunable current levels by controlling the compliance current, compared with devices with evaporated contacts. The devices integrated into an array show suppressed sneak path current and can work as both logic gates and latches to implement logic operations allowing in-memory computing. Cross-sectional scanning transmission electron microscopy analysis validates the feasibility of this nondestructive metal integration approach, the crucial role of high-quality atomically sharp interface in resistive switching, and a direct observation of percolation path. The underlying mechanism of boron vacancies-assisted transport is further supported experimentally by conductive atomic force microscopy free from process-induced damage, and theoretically by ab initio simulations.

Electrical properties of NbN/NbN x /NbN Josephson junctions

In this work, we report the electrical properties of NbN internally shunted Josephson junctions with NbN x barriers. Cross-sectional scanning transmission electron microscopy analysis shows that all layers have the same cubic structure; NbN/NbN x /NbN trilayers were epitaxially grown on MgO substrates. The resistivity of the NbN x films could be varied in the range of 1–104 mΩ cm by controlling both the N2 partial pressure and the deposition time during reactive sputtering. The temperature dependence of the critical current density (J c) and characteristic voltage (I c R n) of the junctions with different barrier resistivities were measured for various barrier thicknesses. For the 10 nm-thick NbN x layer with resistivities of 73.44, 385.72, and 711 mΩ cm, the coherence length of the barrier was determined to be 5.55 ± 0.07, 4.88 ± 0.06, and 1.40 ± 0.13 nm, respectively, corresponding to carrier diffusion rates of 2.741 ± 0.004, 1.211 ± 0.002, and 0.008 ± 0.001 cm2 s−1, respectively. Thus, the reduction in barrier resistivity leads to a larger coherence length and a faster diffusion rate, which will further increase the J c and I c R n of the junction. By adjusting the barrier resistivity and thickness, the J c of the junction can be easily tuned over more than four orders of magnitude, and an I c R n value of 0.97 ± 0.07 mV was obtained at 10 K. The results indicate that the all-NbN self-shunt junction is a promising candidate in high-speed and high-temperature applications.

Optical properties of differing nanolayered structures of divalent europium doped barium fluoride thin films synthesized by pulsed laser deposition

Optically-active thin films are employed in a variety of applications, such as LEDs and photovoltaics, due to their ability to act as up- or down-photon energy converters. Their performance depends critically on their composition and structure; thus, the use of novel synthesis techniques that allow for their control at the nanoscale level can result in improved efficiency and practicality. Layered thin films consisting of Eu2+- doped BaF2 nanocrystalline layers separated by amorphous Al2O3 were synthesized via sequential pulsed laser deposition using three separate targets for the different components; this synthesis technique provides precise control of layer thickness at the nanoscale along with dopant distribution within the film. Cross-sectional transmission electron microscopy analysis verified the desired nano-layering. Post-deposition heat treatments in a nitrogen atmosphere resulted in samples exhibiting steady emission with a broad peak ranging from 400 to 600 nm and a shoulder at 410 nm. The CIE 1931 chromaticity coordinates are x = 0.26–0.29 and y = 0.32–0.35 and vary as a function of the sample configuration. Because the chromaticity coordinates are close to those of a pure white light (x = 0.33,y = 0.33), these films demonstrate advantageous properties for applications with UV-pumped white light LEDs.

Two-dimensional ReS2 : Solution to the unresolved queries on its structure and inter-layer coupling leading to potential optical applications

Over the last few years, ReS2 has generated a myriad of unattended queries regarding its structure, the concomitant thickness dependent electronic properties and apparently contrasting experimental optical response. In this work, with elaborate first-principles investigations, using density functional theory (DFT) and time-dependent DFT (TDDFT), we identify the structure of ReS2, which is capable of reproducing and analyzing the layer-dependent optical response. The theoretical results are further validated by an in-depth structural, chemical, optical and optoelectronic analysis of the large-area ReS2 thin films, grown by chemical vapor deposition (CVD) process. Micro-Raman (MR), X-ray photoelectron spectroscopy (XPS), cross-sectional transmission electron microscopy (TEM) and energy-dispersive X-ray analysis (EDAX) have enabled the optimization of the uniform growth of the CVD films. The correlation between the layer-dependent optical and electronic properties of the excited states was established by static photoluminescence (PL) and transient absorption (TA) measurements. Sulfur vacancy-induced localized mid-gap states render a significantly long life-time of the excitons in these films. The ionic gel top-gated photo-detectors, fabricated from the as-prepared CVD films, exhibit a large photo-response of ~ 5 A/W and a remarkable detectivity of ~ 1011 Jones. The outcome of the present work will be useful to promote the application of vertically grown large-area films in the field of optics and opto-electronics.

Germanium lead alloy on insulator grown by rapid melting growth

High-quality single crystalline germanium lead (GePb) alloys were successfully grown on Si3N4 layer using Si seed by rapid melting growth. The strip composition distribution was studied by Raman spectroscopy and energy dispersive X-ray spectroscopy; the highest Pb content in the GePb strip was 2%. Cross-sectional transmission electron microscopy and selected-area electron diffraction analyses indicated that the GePb strip had a high crystal quality with no dislocations or stacking faults. The GePb strip photodetectors were fabricated and showed good optical properties, with underestimated responsivities of 107, 71, and 20 mA/W at 1310, 1550, and 1630 nm, respectively. Therefore, the rapid melting growth is an effective method for obtaining high Pb content GePb alloys. In addition, GePb devices show high potential for photodetection.