Copper was deposited simultaneously on vacuum cleaved mica and mica cleaved in dry or wet hydrogen with thickness ranging from 10 to 800 Å. After thinning of the mica substrates the cluster growth was studied quantitatively by transmission electron microscopy. It was found that the development of the films grown on gas cleaved mica (epitaxial) precedes the development of the films grown on vacuum cleaved mica (polycrystal). The results are interpreted in term of the kinetic nucleation theory.
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