Conventional Polishing Methods Research Articles

Process parameter analysis of ultrasonic vibration-assisted polishing of SiCp/Al ceramics based on optimized Hilbert trajectories

As an important ceramic matrix composite material, SiCp/Al ceramics have found extensive applications across several domains. However, the intricate nature of their material properties has resulted in a scarcity of scholarly investigations pertaining to the topic of ultrasonic vibration-assisted polishing (UVAP) of SiCp/Al ceramics. To solve this problem, a theoretical derivation of the material removal model (MRM) for UVAP SiCp/Al ceramics is presented in this paper. The selection of UVAP feeding speed is analyzed and discussed. The process parameters of UVAP of SiCp/Al ceramics are optimized based on the improved Hilbert's trajectory characteristics. According to the experimental results, high-quality machined surfaces can be obtained and the “fish scale” phenomenon can be avoided when the feeding speed is 0.015 m/s. Compared with the traditional trajectory, the improved Hilbert trajectory is easier to achieve uniform surface polishing. The introduction of ultrasonic amplitude (UA) can increase the material removal rate (MRR) by more than 21.6 % compared with the conventional polishing method. The maximum removal depth (MRD) increased by more than 27.76 % and the surface roughness (SR) is reduced by more than 76.45 %. The research results have an important application value for realizing efficient and high-quality polishing of SiCp/Al ceramics.

Reducing Surface Roughness of Selective Laser Melting of 316 Stainless Steel Component by Electropolishing

Additive manufacturing (AM) is widely used in the fields of aerospace, automotive, and biomedical. Because it enables to fabricate and customize parts with complex geometrical features. However, due to the layer-by-layer deposition and the partially fused raw material, AM part suffers from the step and balling effects, which shows inadequate and poor surface quality. Conventional polishing methods such as grinding, milling, and sandblasting have been applied to meet the requirement of well surface quality. But these contact polishing techniques usually introduce extra residual stress and surface damage, which are unsuitable for workpieces with complex shapes. In this study, we propose an environmentally friendly electrochemical polishing method for AM 316L stainless steel parts based on a combination of positive and negative pulses. Unlike the traditional phosphoric acid or sulfuric acid electrochemical polishing liquid system, the sodium chloride electrolyte adopted in this study avoids the pollution problem of waste liquid. A negative pulse was introduced to avoid the impaction of Cl- ions to the passivation film generated during the electrochemical polishing process. The effects of voltage, polishing duration, temperature, and duty cycle were analyzed by orthogonal experiments. Under the optimum reaction conditions, a surface roughness Ra of 0.421μm without pitting corrosion is achieved and the balling effect was eliminated.

Influences of Nonaqueous Slurry Components on Polishing 4H-SiC Substrate with a Fixed Abrasive Pad

4H-SiC wafers are more likely to sustain a lower material removal rate (MRR) and severe subsurface damage in conventional chemical mechanical polishing (CMP) methods. To overcome the material removal bottleneck imposed by aqueous chemistry, a high-efficiency polishing of 4H-SiC wafers method by applying reactive nonaqueous fluids to self-sharpening fixed abrasive pads has been proposed in our former research works. Furthermore, to improve the material removal rate and reduce the surface roughness Sa value of 4H-SiC substrates of the Si face, the effect of organic acid, H2O2, and Triton X-100 in nonaqueous slurry on 4H-SiC polishing was investigated. The MRR of 12.83 μm/h and the Sa of 1.45 nm can be obtained by the orthogonally optimized slurry consisting of 3 wt% H2O2, 0.5 wt% Triton X-100 at pH = 3. It is also found that the addition of different levels of oxidant H2O2 and surfactant Triton X-100 components not only increased the MRR of the 4H-SiC substrates of the Si face but also achieved a lower Sa value; in that, the polishing efficiency of the Si side of the 4H-SiC wafers and the surface quality of the 4H-SiC wafers could be effectively improved by the optimization of the polishing slurry.

Finishing the surface micro-layer of additively manufactured TiAl alloy using electro-thermal discharge assisted post-processing

Selective laser melting (SLM) of titanium–aluminium (TiAl) alloy components has gained significant attention in the modern industrial world. The flexibility of the SLM process in producing complex shapes with minimum utilization of material and energy makes it dominant over other manufacturing techniques. As aerospace and biomedical industries demand complex-shaped TiAl alloy components, part fabrication using SLM becomes the ultimate solution. However, the unacceptable level of surface integrity and anisotropic behavior of SLM components demand post processing operations such as laser polishing, chemical polishing, and conventional polishing methods. In this study, a recently developed polishing method called wire electrical discharge polishing (WEDP) is performed on TiAl alloys for obtaining a smooth and defect-free surface. This study aims to investigate the micro-layer modification occurring to the WEDP-processed surface in detail. The experimental results establish the effectiveness of WEDP method in terms of improved surface integrity. The surface finish (Sa) got enhanced by ~88% after WEDP processing. In addition, the thickness of recast layer formed by WEDP was found to be minimum. Moreover, post-processing of TiAl alloy resulted in better surface morphology specifically at lower settings of peak current. It is noteworthy that the migration of wire material was minimum with zinc-coated brass electrode compared to the normal brass electrode. Hence, coated wire electrodes are recommended for WEDP process. In short, an excellent surface integrity can be achieved using WEDP process through favorable surface modification aided by lower peak current and coated wire electrodes. Furthermore, less electrode wear observed in WEDP process enables the deployment of lower feed rates leading to minimal electrode consumption.

Evaluation of EDM inclusion into the conventional polishing of printed Co-Cr alloy by selective laser melting

Objective: The selective laser melting (SLM) technique used in manufacturing results in a rougher surface that requires more satisfying processing than conventional hand-finishing operations. The electro discharge machine (EDM) has various possibilities in the adjustment of surfaces. The present study assesses whether the participation of the EDM technique with the conventional finishing and polishing methods enables surface improvement for the Cobalt- Chromium alloy fabricated by SLM. Material and Methods: Twenty discs of cobalt chromium alloy were fabricated by SLM, divided equally into two groups: (TF) control group for finishing and polishing in the conventional method in accordance with the manufacturer’s recommendations; and (EF) group for conducting polishing incorporating the EDM method. Results: The EF group recorded the lowest mean value of surface roughness and the highest mean value of micro hardness compared to the TF group. Furthermore, statistically significant differences (P < 0.05) were found for surface roughness as well as micro hardness. Conclusion: Reliance of the electric discharge machine proactively within finishing and polishing procedures promotes competence in the conventional polishing method and improves the surface properties of cobalt chromium alloy printed by SLM technology. KEYWORDS Dental finishing; Cobalt-chromium alloy; Selective laser melting; Electric discharge machine; Additive manufacturing.

Removal Modeling and Experimental Verification of Magnetorheological Polishing Fused Silica Glass

Compared to conventional polishing methods, magnetorheological polishing has no subsurface damage and a has good polishing effect, which is suitable for fused silica glass surface processing. However, the existing magnetorheological polishing material removal model has low processing efficiency and uneven removal, which cannot realize the deterministic processing of parts. The material removal (MR) model of fused silica glass is established by convolving the dwell time with the material removal function. The residence time is Fourier transformed. The consequence of process variable such as machining time, workpiece rotational frequency, machining gap and X-direction deflection on the MR of workpiece interface are analyzed. Experiments verify the validity of the material removal model. The surface precision PV value of the workpiece surface under the optimal process parameters was decreased from 7.959 nm to 0.609 nm for machining. The experiment results indicate that the established MR model can be implemented as the deterministic MR of the optical surface and ameliorate the surface accuracy of the workpiece surface.

Improvement in the polishing characteristics of titanium-based materials using electrochemical mechanical polishing

Titanium (Ti) and its alloys are widely used in aerospace components and biomaterials. The smoothing of Ti materials is essential for realizing high-quality Ti-based devices and components to enhance their physical and chemical properties, such as fatigue strength and biocompatibility. However, with conventional polishing methods, obtaining sub-nanometer roughness in a large measurement area is difficult because of the generation of crystal grain steps on the polished surface. This paper presents an electrochemical mechanical polishing (ECMP) method that involves electrochemical oxidation and subsequent oxide removal using SiO2 particles to achieve a high material removal rate (MRR) and an ultra-smooth surface of pure Ti and Ti-6Al-4V. Under suitable electrolytic current and mechanical conditions, ECMP provides a higher MRR and smoother pure Ti surface than electroless polishing. X-ray and Raman analyses indicate that the mechanical condition affects the chemical states of polished surfaces; higher mechanical conditions retain less oxide film on the polished surface, resulting in a smoother surface. The highly efficient ECMP provides a defect-free and sub-nanometer roughness for pure Ti and Ti-6Al-4V surfaces without using chemicals. Furthermore, it is an environment-friendly and cost-effective approach to prepare Ti-based components.

Ultra-smooth surface with 0.4 Å roughness on fused silica

Ultra-smooth surface with sub-nanometer roughness is of great significance in various fields, including Ring Laser Gyro (RLG), high-power laser apparatus, ultraviolet optical systems, and the semiconductor industry. However, the mechanism of the ultra-smooth polishing process remains to be studied, which is of great value for understanding and optimizing optical-fabrication methods. This paper establishes a relationship between surface densification characteristics and surface roughness in conventional polishing. Moreover, we conclude that the densification process created by the longitudinal pressure, which avoids non-uniformity, is beneficial to forming super-smooth surfaces in the conventional polishing methods. Under this guidance, we can stably fabricate ultra-smooth surfaces on fused silica with 0.4 Å roughness. This result overturns the mainstream view that the longitudinal pressure in polishing should be minimized. This conclusion is meaningful for the understanding of the ultra-smooth surface formation not only in conventional polishing but also in other optical-fabrication technologies.

Magnetorheological method applied to optics polishing: A review

Magnetorheological finishing method is carried out in order to correct errors of figures which are produced by conventional polishing methods on planes, spheres, aspheres and freeform optics having surface roughness value as low as 1 nm RMS. Low surface roughness and mid-spatial frequencies in advanced optical systems are essential for minimizing flare and energy loss. Magnetorheological polishing fluid is a clever fluid that can alternate from its liquid phase to almost solid under magnetic field influence. The main key process parameters in magnetorheological finishing process such as fluid composition, rheological properties along with the surface quality of polished optical components (including metal, glass, and ceramic) are reviewed in the present manuscript.

Review on modeling and application of chemical mechanical polishing

Abstract With the development of integrated circuit technology, especially after entering the sub-micron process, the reduction of critical dimensions and the realization of high-density devices, the flatness between integrated circuit material layers is becoming more and more critical. Because conventional mechanical polishing methods inevitably produce scratches of the same size as the device in metal or even dielectric layers, resulting in depth of field and focus problems in lithography. The first planarization technique to achieve application is spin on glass (SOG) technology. However, this technology will not only introduce new material layers, but will also fail to achieve the global flattening required by VLSI and ULSI technologies. Moreover, the process instability and uniformity during spin coating do not meet the high flatness requirements of the wafer surface. Also, while some techniques such as reverse etching and glass reflow can achieve submicron level regional planarization. After the critical dimension reaches 0.35 microns (sub-micron process), the above methods cannot meet the requirements of lithography and interconnect fabrication. In the 1980s, IBM first introduced the chemical mechanical polishing (CMP) technology used to manufacture precision optical instruments into its DRAM manufacturing [1]. With the development of technology nodes and critical dimensions, CMP technology has been widely used in the Front End Of Line (FEOL) and Back End Of Line (BEOL) processes [2]. Since the invention of chemical mechanical polishing, scientists have not stopped studying its internal mechanism. From the earliest Preston Formula (1927) to today’s wafer scale, chip scale, polishing pad contact, polishing pad - abrasive - wafer contact and material removal models, there are five different scale models from macro to the micro [3]. Many research methods, such as contact mechanics, multiphase flow kinetics, chemical reaction kinetics, molecular dynamics, etc., have been applied to explain the principles of chemical mechanical polishing to establish models. This paper mainly introduces and summarizes the different models of chemical mechanical polishing technology. The various application scenarios and advantages and dis-advantages of the model are discussed, and the development of modeling technology is introduced.

Development of super-smooth flat silicon mirror substrates using bowl-feed chemical-mechanical polishing

Silicon is one of the important optical substrate materials used for making high reflectivity, high damage threshold mirrors for high power/energy IR lasers and grazing incidence synchrotron X-ray mirrors. These applications require ultra-low roughness or super-smooth substrates that ensure extremely low scattering losses. The present work is an attempt to fabricate super-smooth, flat silicon substrates using the conventional Chemical-Mechanical Polishing (CMP) method with bowl-feed technique. The roughness parameters of the ultra-smooth flat silicon surfaces fabricated using bowl-feed CMP have been measured in Atomic Force Microscope (AFM) and by hard X-Ray Reflectivity (XRR) and are found to be of the order of 5 Å. The surface morphologies of the polished silicon surfaces were also investigated using a Scanning Electron Microscope (SEM). We briefly discuss the bowl-feed CMP process of producing super-smooth, flat silicon substrates and presented the results of surface roughness measurements using various techniques.

Removal of millimeter-scale rolled edges using bevel-cut-like tool influence function in magnetorheological jet polishing.

Subaperture polishing techniques usually produce rolled edges due to edge effect. The rolled edges, especially those in millimeter scale on small components, are difficult to eliminate using conventional polishing methods. Magnetorheological jet polishing (MJP) offers the possibility of the removal of these structures, owing to its small tool influence function (TIF) size. Hence, we investigate the removal characters of inclined MJP jetting models by means of computational fluid dynamics (CFD) simulations and polishing experiments. A discrete phase model (DPM) is introduced in the simulation to get the influence of abrasive particle concentration on the removal mechanism. Therefore, a more accurate model for MJP removal mechanisms is built. With several critical problems solved, a small bevel-cut-like TIF (B-TIF), which has fine acentric and unimodal characteristics, is obtained through inclined jetting. The B-TIF proves to have little edge effect and is applied in surface polishing of thin rolled edges. Finally, the RMS of the experimental section profile converges from 10.5nm to 1.4nm, and the rolled edges are successfully suppressed. Consequently, it is validated that the B-TIF has remarkable ability in the removal of millimeter-scale rolled edges.

磁気研磨ブラシによる研磨機構の解明

Nowadays, a free-form surface, such as molding die surface, is required to be finished by reducing the environmental burden. Therefore, a novel polishing technology is needed with a less abrasive slurry,for the reduction of which a magnetic abrasive finishing method is attracting attention. However, it is well known that a conventional magnetic polishing method is unstable and insufficient to obtain the required surface roughness. In the present paper, we discuss the reasons causing instability in conventional magnetic polishing. We systematically investigate the magnetic pressure distribution characteristics and measure the pressing force distribution of the magnetic brush during machining. Furthermore, to observethe impact of an iron particle shape on the pressing force, we used steel balls (steel-ball brush) and abrasive slurry. Moreover, we compared this brush with a brush that uses iron powder paste (employed in the conventional magnetic polishing method). Thus, we determined the possibility of the wide range control of the pressing force by changing the shape and size of the magnetic material. The setting of the approach conditions should be sufficient because it could deteriorate the shape accuracy through very high pressure.

Faster and Smoother Thanks to Laser Polishing

AbstractThe demand for the lowest possible surface roughness is growing — partly for aesthetic but primarily for functional reasons. Conventional polishing methods are reaching their limits, and conventional laser systems achieve results which are good but not sufficiently reproducible. The laser micro machining specialists at GFH GmbH have now tested ultra‐short pulse lasers as an alternative. These had previously not been considered on account of their largely melt‐free mode of operation. In burst mode, however, they achieved a significant reduction in surface roughness and simultaneously reduced the process times.

Investigation of Sample Preparation Method for Microstructural Observation of Thermal Spray Coatings

Usually, the mechanical polishing methods have been used to prepare a sample for the microstructural observation of thermal spray coatings. In this study, the microstructure of thermal coatings prepared by an argon ion beam polishing was investigated. Especially, it was focused in this study to investigate the influence of the sample preparation method on the area ratio of porosity of thermal coating. The experimental results revealed that the microstructure of thermal coatings in SEM image was changed by the polishing method. The cross section microstructure fabricated by the argon ion beam polisher showed that it creates a mirror surface with minimized artifacts such as smearing of pores which can be made by conventional mechanical polishing method. As the results, the sample polished by the argon ion beam exhibits higher porosity than that by the conventional mechanical polishing method.

Improvement of Finishing Efficiency Considering Contact Behavior of Polishing Pad with Workpiece Surface

Recently, the achievement of further high-efficiency and high-quality polishing of glass disks as substrates of hard disk drives has been strongly required for reducing the production cost, increasing the storage capacity and downsizing the drive. In order to meet the requirements, it is very important to clarify and improve the polishing properties of suede polishing pads widely used in polishing glass disks and however, a very few researches concerning the pads have been conducted. Thus to overcome the problem, we performed the polishing experiments for glass disks in actual and found that the surface structure of the suede pads is key factor for improving the polishing efficiency. Based on the findings, we proposed a new polishing method that the polishing pad / workpiece contact zone is made intermittent and abrasives are uniformly supplied on the contact zone. As a result, it was found that high-efficiency and high-quality finishing were achieved by the method, as compared with the conventional polishing method.

Influence of Magnetic Field Strength on Polishing Effect of the Tiny-Grinding Wheel Cluster Based on the Magnetorheological Effect

A new tiny-grinding wheel cluster polishing method based on the Magnetorheological (MR) effect is presented to polish optical glass in this paper and some process experiments were conducted to reveal the influence of magnetic field strength, the content of carbonyl iron in the MR fluid and the speed of polishing disc on the material removal rate and the surface roughness of the glass workpiece. The results indicate that when the external magnetic field is applied, the material removal rate of the workpiece improves rapidly but the surface roughness increases slightly. When the Magnetic field strength is 100 Gs and the content of carbonyl iron is 3.5%, the material removal rate improves by a factor of 16.8% compared with that of the conventional polishing methods with dissociative abrasive particles, while the surface roughness of the workpiece increases unobviously.

The coupled FEM analysis of super-high angular speed polishing of diamond films

AbstractSuper-high angular speed polishing of diamond films is a new polishing method. During the polishing process, the rotational velocity of the cast iron polishing plate is higher than that of conventional polishing methods, and friction between the polishing plate and the diamond film during rotary motion generates heat that creates a diffusion condition for carbon atoms. The temperature and strain energy density distributions of the polished surface directly affect the polishing quality of diamond films. In this paper, a three-dimensional thermo-mechanical coupled finite element analysis was employed to analyze the temperature and strain energy due to the friction between the polishing plate and the thick diamond film while the polishing plate rotates at super-high angular speed. The results indicate that when the diamond film and polishing plate rotate in the same direction, the differences of temperature and strain energy evidently decrease, and the temperature and strain energy in the diamond film become more uniform. The removal rate by super-high speed polishing has been quantitatively described by the diffusion mechanism, and it agrees well with the experiment data. This work will provide theoretical guidance to the design and operation of the super-high speed polishing of diamond films.

Precise SEM Cross Section Polishing via Argon Beam Milling

Abstract SEM observation of a specimen cross section can provide important information for research and development as well as failure analysis. In most cases, surface observation alone cannot provide information concerning the cross sectional structure of granular materials, layered materials, fibrous materials, and powders. Preparing highly-polished cross sections of these materials is both a science and an art. Typically, a cross section is prepared using mechanical means like conventional mechanical polishing methods or a microtome. The sample is first embedded in a holder or device, and then polished to achieve a flat cross section. In some cases, a staining procedure is used to highlight a specific component of the sample. Such methods can be lengthy procedures that require a great deal of skill, and can introduce artifacts into soft materials, deform the material around voids, or compress layers of soft and hard materials in composite samples. Mechanical polishing can miss fine details such as the presence of hairline cracks, and present a challenge to water-soluble phases.

Evaluation of Cleanability of a Titanium Dioxide(TiO2) -coated Acrylic Resin Denture Base

Purpose: The purpose of this study was to evaluate the cleanability of a titanium dioxide (TiO2)-coated acrylic resin denture base.Materials and Methods: Two groups of acrylic resin denture base plate specimens were prepared: 1) the TiO2-coated group, and 2) the Polished group made using a conventional polishing method. The surface roughness and contact angle of plate specimens from both groups were measured. Each plate was immersed in an experimental bolus. Subsequently, the amount of experimental bolus residue left on the surfaces of the plates after ultrasonic cleaning was compared between groups. The groups were further divided into two groups with and without ultraviolet-A ray irradiation during cleaning.Results: The surface roughness of the TiO2-coated group was greater than that of the Polished group. Inversely, the contact angle of the TiO2-coated group was smaller than that of the Polished group (one-tenth that of the Polished group). There was a significant reduction in the experimental bolus residue ratio on the surfaces of the TiO2-coated plates. The use of ultraviolet-A ray irradiation was not significantly different. The decrease in the experimental bolus residue ratio of the TiO2-coated group was believed to be due to the considerable improvement in the wettability of the plates.Conclusion: The TiO2 coating on an acrylic resin denture base had a positive effect on its ease of cleaning by preventing the accumulation of experimental bolus residue.