In order to provide sufficient and stable Na+ for the CIGS flexible thin film solar cells, Mo–Na ceramic targets were prepared by the plasma-assisted cold sintering process (CSPS). And the film-forming properties of the Mo–Na targets were studied. The Mo–Na targets were prepared with MoO3 as precursor. The Mo–Na targets were successfully prepared with uniformity, compactness and high relative density (98.19 %). Then, the Mo–Na monolayer films were prepared by radio frequency (RF) magnetron sputtering. The results show that Mo–Na monolayer films are homogeneous and compact. Significantly, abundant Na+ are stored in the Mo–Na monolayer films. To verify the application of Mo–Na targets in the CIGS cells, the sandwich structure (Mo/Mo–Na/Mo) films and co-sputtered films were studied. The results show that the co-sputtered films have sufficient Na+, and show good photoelectric and mechanical properties. In addition, after heat treatment, Na+ can diffuse to the surface of the sandwich films, which can provide sufficient and stable Na+ for CIGS thin film cells.
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