Cu ( In , Ga ) ( S , Se ) 2 - (“CIGSSe”) based solar cells with a ZnO layer deposited by the ion layer gas reaction (ILGAR) method yield superior efficiencies (15.0%) than the references with a chemical bath-deposited CdS buffer (14.1%). However, this high performance is only reached if the absorber is pretreated in a Cd2+- and aqueous ammonia-containing bath prior to the ILGAR-ZnO deposition. The photovoltaic as well as the dark device parameters are strongly influenced by this treatment. Scanning and transmission electron microscopy (TEM) as well as x-ray diffraction measurements reveal a different morphology and structure of ILGAR-ZnO layers on top of Cd2+∕NH3-treated and on as-deposited absorbers, indicating a considerably modified absorber surface. By energy dispersive x-ray analysis in the TEM, Cd could only be identified at the ILGAR-ZnO∕Cd2+∕NH3-treated-CIGSSe interface of the respective cross sections, if the absorber was treated in a bath with an atypically high Cd2+-concentration. In this case a Cd-containing thin layer between ZnO and CIGSSe was observed in TEM images.