Abstract— The channel‐length‐dependent transfer characteristics of TFTs using poly‐Si by metal‐induced crystallization through a cap (MICC) of a‐Si to evaluate the parasitic and channel resistances have been studied. The MICC p‐channel TFTs studied in the present work showed a maximum field‐effect mobility, threshold voltage, and gate swing of 53 cm2/V‐sec, −4.4 V, and 0.8 V/dec for W/L = 12 μm/6 μm, 71 cm2/V‐sec, −5.3 V, and 0.9 V/dec for W/L = 12 μm/12 μm, and 113 cm2/V‐sec, −7 V, and 1 V/dec for W/L = 12 μm/24 μm, respectively. It is found that the parasitic resistance is higher than the channel resistance, and both decrease with increasing temperature.