This paper presents calculations of electromagnetic field distributions with different microwave-driven devices. Results are obtained by using a two-dimensional numerical simulation tool that solves Maxwell's equations for an axis-symmetric TM mode, by considering a harmonic time description. The tool is applied to a coaxial waveguide, a circular waveguide with a shortening plate at the top, and a plasma reactor operated by an axial injection torch. This reactor consists of a circular cavity powered by a coaxial waveguide assembled to a nozzle, and creates a micro-plasma that affects only very locally the electric field distribution. We compare the solutions obtained for the three devices. We also carry out a simulation benchmarking in terms of accuracy, by using the analytical solution to the problem (in cases where it is available), or in terms of precision, by using the numerical calculation of the average power absorbed (in the presence of plasma).
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