High power industrial multibeam CO2 lasers consist of a large number of closely packed parallel glass discharge tubes sharing a common plane parallel resonator. Every discharge tube forms an independent resonator. When discharge tubes of smaller diameter are used and the Fresnel numberN ≪ 1 for all resonators, they operate in waveguide mode. Waveguide modes have excellent discrimination of higher order modes. A DC excited waveguide multibeam CO2 laser is reported having six glass discharge tubes. Simultaneous excitation of DC discharge in all sections is achieved by producing pre-ionization using an auxiliary high frequency pulsed discharge along with its other advantages. Maximum 170 W output power is obtained with all beams operating in EH11 waveguide mode. The specific power of 28 W/m is much higher as compared to similar AC excited waveguide multibeam CO2 lasers. Theoretical analysis shows that all resonators of this laser will support only EH11 mode. This laser is successfully used for woodcutting