Amorphous hydrogenated silicon, silicon nitride, silicon–carbon and boron-doped silicon–carbon films on molybdenum and aluminum substrates were evaluated as corrosion barriers. Specimens were anodically polarized in NaCl and Na2SO4 solutions and also treated with NaCl and Na2SO4 during exposure in an environmental chamber at 85% RH at 30°C. The silicon nitride and silicon–carbon films were inert and rendered substantial protection while the silicon films showed signs of extensive deterioration. Initiation sites for localized corrosion in the silicon nitride and silicon–carbon films were found not only at film pinholes caused by spallation, but also at microcracks and in regions where visible defects could not be detected using scanning electron microscopy.
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