The paper presents a model which describes the stage circuit of Distributed MEMS Transmission Line (DMTL) phase shifter at Ka band and an approach for DMTL design utilizing the saw-shaped coplanar waveguide(CPW). The result of circuit simulation and full wave analysis prove that the model is in good agreement with theoretical analysis. The model can effectively simplify the design complexity after optimization. Simulation results show that the S11 and S21 can achieve -20 dB and -2.5 dB, respectively, and the phase shift arrives at −180 ◦ at Ka band. Comparing with literature data, it has been predicted that S11 improves about 8 dB and the phase shift can increase about 100 ◦ in the same condition.
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