Abstract
A broad range tunable optical filter using a torsional micromechanical structure is presented. The device has a continuous tuning range over 100 nm, from 1500 to 1600 nm, and the structure eliminates the potential catastrophic discharge problem associated with electrostatic micromachines. Transmission of a 2.5-Gb/s directly modulated 1550-nm vertical-cavity surface-emitting laser through the tunable filter shows no power penalty.
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