Abstract
We have demonstrated a planar waveguide-based tunable integrated optical filter in indium phosphide (InP) with on-chip micro-electro-mechanical (MEMS) actuation. An air-gap Fabry-Perot resonant microcavity is formed between two waveguides, whose facets have monolithically integrated high-reflectivity multilayer InP/air Distributed Bragg Reflector (DBR) mirrors. A suspended beam electrostatic microactuator attached to one of the DBR mirrors modulates the microcavity length, resulting in a tunable filter. The DBR mirrors provide a broad high-reflectivity spectrum, within which the transmission wavelength can be tuned. The in-plane configuration of the filter enables easy integration with other active and passive waveguide-based optoelectronic devices on a chip and simplifies fiber alignment. Experimental results from the first generation of tunable optical filters are presented. The microfabricated filter exhibited a resonant wavelength shift of 12nm (1513-1525nm) at a low operating voltage of 7V. A full-width-half-maximum (FWHM) of 33 nm was experimentally observed, and the quality factor was calculated to be 46. Several improvements of the MEMS actuator, waveguide, and optical cavity design for the future devices are discussed.
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