Abstract
In recent years, laser scanners have attracted significant attention for applications such as laser radars. However, the establishment of a two-degree-of-freedom scanner that can quasi-statically drive a large mirror with a large deflection angle has proven to be challenging. In this paper, we propose a laser scanner design and fabrication method by combining two unimorph piezoelectric actuators composed of piezoelectric single-crystal Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 and a miniature translation-rotation conversion mechanism with flexible polyimide hinges. The size of the entire scanner was 32 mm × 12 mm × 10 mm. We successfully demonstrated that the scanner could achieve a large quasi-static mechanical deflection angle amplitude of 20.5° in two axes with a 6-mm-square mirror.
Highlights
Laser scanners, which are realized by maneuvering a movable mirror using an actuator, are expected to have a wide range of applications, including displays [1,2,3,4], laser radars [5,6,7], optical communications [8,9], and laser processing [10,11]
There is a great demand for quasi-static vector scan driving in applications such as measurements based on laser radars, free-space optic communications, and laser processing
We focus on a time-of-flight (ToF) laser radar system
Summary
Laser scanners, which are realized by maneuvering a movable mirror using an actuator, are expected to have a wide range of applications, including displays [1,2,3,4], laser radars [5,6,7], optical communications [8,9], and laser processing [10,11]. A wide scanning range is desirable in all these applications. Resonance driving is not suitable for all applications. There is a great demand for quasi-static vector scan driving in applications such as measurements based on laser radars, free-space optic communications, and laser processing. The key parameters of laser scanners are mirror size, scan angle, and scan speed
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