Abstract
A compact two-dimensional micro scanner with small volume, large deflection angles and high frequency is presented and the two-dimensional laser scanning is achieved by specular reflection. To achieve large deflection angles, the micro scanner excited by a piezoelectric actuator operates in the resonance mode. The scanning frequencies and the maximum scanning angles of the two degrees of freedom are analyzed by modeling and simulation of the structure. For the deflection angle measurement, piezoresistors are integrated in the micro scanner. The appropriate directions and crystal orientations of the piezoresistors are designed to obtain the large piezoresistive coefficients for the high sensitivities. Wheatstone bridges are used to measure the deflection angles of each direction independently and precisely. The scanner is fabricated and packaged with the piezoelectric actuator and the piezoresistors detection circuits in a size of 28 mm×20 mm×18 mm. The experiment shows that the two scanning frequencies are 216.8 Hz and 464.8 Hz, respectively. By an actuation displacement of 10 μm, the scanning range of the two-dimensional micro scanner is above 26° × 23°. The deflection angle measurement sensitivities for two directions are 59 mV/deg and 30 mV/deg, respectively.
Highlights
With the development of the micro-electronics technology, micro-optical-electro mechanical systems (MOEMS) have provided new features to spacecraft and the micromation of satellites has become a general trend
The two resonance frequencies of the two-dimensional micro scanner are measured by the frequency sweeping method and the scanning amplitude is detected by a laser interferometer measurement system
To achieve two-dimensional laser scanning, a compact two-dimensional micro scanner has been developed in this paper
Summary
With the development of the micro-electronics technology, micro-optical-electro mechanical systems (MOEMS) have provided new features to spacecraft and the micromation of satellites has become a general trend. The two-dimensional micro scanner has great advantages over the conventional scanning mechanisms of the traditional satellites such as low power consumption, small volume and high frequency It has a broad range of space applications in micro-satellites. The mechanisms and circuits of these are complicated, with low integration and limited sensitivity Aiming at fixing these deficiencies, a compact two-dimensional micro scanner with a piezoelectric actuator and piezoresistors is presented in this paper. It has a small volume with high integration and a decoupling measurement method of deflection angles with high sensitivities is presented for the twodimensional micro scanner. The details concerning the structure, operation principle, simulation, deflection angles measurement, fabrication process and experimental results are described
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