Abstract
2]1 transition of Ar(I) in a facing target sputtering chamber is measured using aTi:sapphireringlaseratseveraloperatingconditions. DopplerwidthandlineintensityaredeterminedbyanalysisusingtheVoigtfunction. ThethermodynamictemperaturedeterminedfromtheDopplerwidthincreaseslinearlywithdischargecurrentandgaspressure. Thepopulationdensityfromthelineintensityisreducedtothereferencetemperature obtained by interpolating the discharge current to zero. The empirical relationship to describepopulationdensityatadischargecurrentandagaspressureisdiscussed.PACSnumbers:32.30.–r,42.62.Fi,52.70.–m
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