Abstract
Ultrasonic bonding has an increasing application in the micro assembly of polymeric micro-electro mechanical systems (MEMS) with high requirements for fusion precision. In the ultrasonic bonding process, the propagation of ultrasonic vibration in polymer components is related to the interfacial fusion, which can be used as a monitoring parameter to control ultrasonic energy. To study the vibration propagation in viscoelastic polymer components, finite element analysis on the bonding of poly methyl methacrylate (PMMA) micro connector to substrate for microfluidic system is carried out. Curves of propagated vibration amplitude corresponding to interfacial temperatures are obtained. The ultrasonic vibration propagated in PMMA components are measured through experiments. The theoretical and experimental results are contrasted to analyze the change mechanism of vibration propagation related to temperature. Based on the ultrasonic bonding process controlled by the feedback of vibration propagation, interfacial fusions at different vibration propagation states are obtained through experiments. Interfacial fusion behavior is contrasted to the propagated vibration amplitude in theoretical and experimental studies. The relation between vibration propagation and fusion degree is established with the proper parameter range for the obtained high quality bonding.
Highlights
Thermoplastic polymers are widely used in micro-electro mechanical systems (MEMS) because of their good mechanical properties and easy processing
The more changing of vibration propagation in the ultrasonic process is studied by theoretical spreads quickly as the mobility of molecular chains bonding is enhanced at the temperature that is and experimental analysis in this paper
The changing of vibration propagation in the ultrasonic bonding process is studied by theoretical and experimental analysis in this paper
Summary
Thermoplastic polymers are widely used in micro-electro mechanical systems (MEMS) because of their good mechanical properties and easy processing. The traditional ultrasonic bonding methods for the parts in large scale were adopted with the controlling parameters of time, pressure, electrical energy, or collapse displacement being utilized. To improve the control precision of fusion bonding for micro joint, Sun proposed an ultrasonic bonding method based on ultrasonic propagation [6] This method utilized the vibration propagated in polymer components as a feedback parameter to control the energy, which made the interfacial fusion degree much more precisely controllable. The interfacial polymer changes from glassy state to viscoelastic state along with the temperature rising In this process, ultrasonic vibration propagated in the fusion interface changes, which is a potential monitoring parameter for fusion polymer states. Vibration propagation and interfacial fusion behavior in ultrasonic processes are analyzed based on the theoretical and experimental results.
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