Abstract
Precursor solution for YMnO3 thin films were prepared through the reaction of yttrium iso-propoxide and manganese iso-propoxide in the ethylene glycol monomethyl ether (EGMME). The YMnO3 films were prepared by spin coating on substrates and crystallized via rapid thermal annealing. Phase purity of YMnO3 films depended on the heat-treatment ambient. Hexagonal YMnO3 thin film with fine and smooth surface was successfully synthesized using the solution of yttrium and manganese iso-propoxides and heat-treating at 750°C in vacuum ambient. The orientation of YMnO3 films depended on substrate, and YMnO3 film on Pt/sapphire C substrate had c-axis orientation.
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