Synthesis of New Liquid Mixed Sr-Ta and Sr-Nb Alkoxides as CVD Precursors for Metal Oxide Thin Films

Abstract

Communication: The preparation of a volatile single-source precursor containing two or more types of metals is challenging. Such single-source CVD liquid precursors have been prepared and studied by these authors. One precursor is capable of delivering vapor containing equal amounts of Sr and Ta. The second is a liquid mixture of two precursors containing Sr–Ta and Sr–Nb and has the collective formula Sr[Ta0.7Nb0.3(OC2H5)5-(OC2H4OCH3)]2. Satisfactory Sr–Ta–Nb–O films are deposited at 500 °C and factors affecting deposition have been studied.