Synthesis of Crystalline Carbon Nitride Nanocone Arrays by Direct‐Current Discharge Plasma‐Assisted CVD

Abstract

AbstractCrystalline carbon nitride nanocone (CNNC) arrays are prepared by a rather simple and facile direct current, abnormal glow discharge plasma‐assisted (PA) CVD method. The CNNCs are grown on the surfaces of (100) silicon wafers covered by Co/Ni intermediate layers. The experiments are carried out in an atmosphere of mixtures of methane and nitrogen, under a total pressure of 4000 Pa, and CH4/N2 pressure ratios in the range 1:50–1:5. The as‐grown CNNCs are vertically aligned in arrays with rather perfect crystallinity, and smallest tip diameters of 2–3 nm. Based on the optical emission spectra from the abnormal glow discharge plasma, the growth mechanism of the as‐grown CNNCs is discussed.