Substrate dependent growth modes of ZnO nanorods grown by metalorganic chemical vapor deposition

Abstract

Transmission electron microscopy studies were performed to reveal the underlying growth modes of ZnO nanorods by metalorganic chemical vapor deposition with respect to the type of substrates. On well-matched substrates, such as GaN/Al2O3 (0001) and ZnO (0001) substrates, a 2-dimensional (D) layer-by-layer growth occurs. During further growth after a certain critical thickness of ∼40nm, 1D nanorods start to grow on the 2D layer. In contrast, only vertically-aligned ZnO nanorods grow on a partially-matched substrate, such as Al2O3 (0001), after the coalescence of 3D ZnO islands. On mismatched substrates, such as Si (111) and Si (001), an Si–O amorphous layer of ∼5nm forms first, on which 3D ZnO islands grow. After their coalescence, 1D nanorods start to grow.