Abstract

We report on the synthesis of PbTiO3- and Pb(Zr,Ti)O3 (PZT)-covered ZnO nanorods by metalorganic chemical vapor deposition (MOCVD) and their piezoelectric properties. Single-crystal ZnO nanorods with diameters of 140–230 nm and lengths of ∼13 µm were grown on SiO2/Si by a self-assembly process using MOCVD. Subsequently, polycrystalline PbTiO3 and PZT were also deposited on the ZnO nanorods by MOCVD. Scanning and transmission electron microscopy revealed that PbTiO3 and PZT uniformly covered the ZnO nanorods with aspect ratios above 50. Piezoelectric force microscopy revealed that PbTiO3- and PZT-covered ZnO nanorods showed a piezoresponse of 50–100 pm/V.

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