Abstract
In view of the lack of high concentration online gas detection sensors in the current mine safety monitoring system to cope with gas emission and gas outburst, a design method of full-range gas sensor based on ceramic micro-hot plate is presented in this paper. COMSOL finite element simulation is used to study the thermal field coupling of sensor array units. Based on the electro-thermal coupling model, the thermal field was est ablished, and the influence of isolation groove, base material, working temperature and platinum film thickness on the thermal interference between the sensor units was studied. The results show that the heat loss is reduced by 2.57 times and the heating efficiency is improved. Compared with AlN and SiC ceramic substrates, Al2O3 has the least thermal disturbance and the best thermal performance. The average working temperature at 1.3v reaches 587.77k. The temperature difference between the units is directly proportional to the unit operating temperature. Increasing the thickness of platinum film can improve the working temperature and heating efficiency. The research provides a t heoretical basis for the design of the integrated MEMS array gas sensor.
Published Version
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