Abstract
CN films were made by a facing target sputtering system. X-ray diffraction, x-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy and Raman spectroscopy spectra were measured to investigate the structure and the binding state of the film. The films are amorphous and the N/C increases as the N2 partial pressure increases and it reaches 0.46 when the N2 pressure is 100%. The N incorporated C forms N-sp2 C and N-sp3 C mainly and there is a small amount of C≡N. The incorporated N causes structural disorder of the C films and a reduction in the friction coefficient of the films.
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