Abstract
In this study, lateral-field-excitation (LFE) bulk acoustic wave sensors based on the structure ordered Ca3TaGa3Si2O14 (CTGS) crystal are investigated. It is found that LFE devices using (yxl)-6° CTGS crystal can operate with the pseudo-LFE mode. The impedance characteristics and sensitivities of the devices are measured and compared with the LFE devices based on structure disordered langasite (LGS) crystal. The experimental results show that the CTGS LFE sensor can achieve higher Q-factors than the LGS LFE sensor, which indicates that the former has higher frequency-stability. In addition, the CTGS LFE sensor is nearly 2 times more sensitive to both liquid conductivity and permittivity changes compared to the LGS LFE sensor. For liquid acoustic viscosity changes, the CTGS LFE sensor is approximately 1.3 times more sensitive than the latter. In some chemical and biological analysis process, mechanical and electrical property changes of analytes need to be measured simultaneously, therefore the LFE sensors based on the structure ordered CTGS crystal have a good potential for use in liquid-phase sensing of chemical and biological systems.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call