Abstract
The double-mode lateral-field-excitation (LFE) bulk acoustic wave characteristics of Ca3TaGa3Si2O14 (CTGS) crystals are investigated. It is found that LFE devices based on (yxl)-57° CTGS crystals can work on both pure-LFE and pseudo-LFE modes when the driving electric field direction is normal to the crystallographic x axis of the piezoelectric substrate. Several double-mode LFE bulk acoustic wave devices based on CTGS crystals are designed and tested. The experimental results conform to the theoretical prediction well. Being able to operate in pure-LFE and pseudo-LFE modes, the double-mode LFE sensors show high sensitivity to both mechanical and electrical property changes of analytes. The results provide the crystal cut for double-mode LFE sensors, which is a critical basis of designing high-performance chemical and biological sensors by using double-mode LFE devices.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call